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Laser ultrasonic system and method for detecting thermal diffusivity of nano-film in non-contact manner

A thermal diffusivity, nano-film technology, applied in the analysis of solids, measuring devices, and material thermal development using sonic/ultrasonic/infrasonic waves. Accurate information and accurate thermal diffusivity

Pending Publication Date: 2020-06-12
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, if the thermal diffusivity of the film is analyzed by directly detecting the light intensity information diffracted by the sample, the micro-vibration caused by the excited ultrasonic signal may be very small, which is not enough to analyze the relevant information of the ultrasonic signal and the thermal diffusivity of the film. Diffusion rate
However, if an ordinary heterodyne detection system with a parallel plate is added, the adjustment method is rough and not precise enough, and the precise phase matching requirements between the two beams cannot be accurately completed, and the precise measurement of the thermal diffusivity of the film cannot be realized.

Method used

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  • Laser ultrasonic system and method for detecting thermal diffusivity of nano-film in non-contact manner
  • Laser ultrasonic system and method for detecting thermal diffusivity of nano-film in non-contact manner
  • Laser ultrasonic system and method for detecting thermal diffusivity of nano-film in non-contact manner

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Embodiment Construction

[0047] Such as figure 1 , 2 As shown, a laser ultrasonic system for non-contact detection of thermal diffusivity of nano-films, including an excitation light emission module, a detection light emission module, a dichroic mirror 4, a phase mask 7, a shutter 8, and a first achromatic lens 9. The phase adjuster 10, the second achromatic lens 11, the moving sample stage and the signal receiving module are set to:

[0048] The excitation light emitted by the excitation light emission module is transmitted through the dichroic mirror 4 and then focused to the phase mask 7. The phase mask 7 divides the excitation light into two beams, and the two beams of excitation light pass through the shutter 8 and the first achromatic lens in sequence. 9. The second achromatic lens 11 focuses on the sample surface set on the moving sample stage;

[0049] The detection light emitted by the detection light emitting module is reflected by the dichroic mirror 4 and then focused to the phase mask 7...

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Abstract

The invention discloses a laser ultrasonic system and method for detecting the thermal diffusivity of a nano-film in a non-contact mode. The system comprises an exciting light emitting module, a detection light emitting module, a dichroscope, a phase mask plate, a dimmer, a first achromatic lens, a phase regulator, a second achromatic lens, a movable sample table and a signal receiving module. According to the invention, the thermal diffusivity of the nano-film is further obtained by analyzing the heterodyne signal carrying the micro-vibration information detected by the detector.

Description

technical field [0001] The invention belongs to the field of laser ultrasonic non-contact detection, in particular to a laser ultrasonic system and method for non-contact detection of thermal diffusivity of nanometer films. Background technique [0002] Nano film materials have the characteristics of impact resistance, wear resistance and thermal breakdown resistance. They are commonly used as conductive and dielectric elements in microelectronics, often as reflective or polarizing elements in integrated optics, and have many other applications in aerospace, biotechnology, automotive, photography, and magnetic disk industries. Many conventional spectroscopic and scanning probing techniques can determine the chemical, morphological, and other properties of nanofilms. However, there are not many suitable techniques for measuring thermal diffusivity in thin films, in part because nanomaterials can be thin or small and easily damaged. [0003] Laser ultrasonic non-destructive ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/07G01N21/17G01N25/20
CPCG01N29/07G01N21/1702G01N25/20G01N2021/1706G01N2291/0237
Inventor 顾凯熊吉川刘学峰徐彬
Owner NANJING UNIV OF SCI & TECH
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