A vibration isolation device
A vibration isolation and isolation device technology, which is applied in vibration suppression adjustment, non-rotational vibration suppression, exposure device of photo-plate making process, etc., can solve problems such as heat loss, large vibration transmission attenuation, etc.
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0029] refer to figure 1 , figure 1 A schematic diagram of the main structure of the extreme ultraviolet lithography vibration isolation device in the embodiment of the present invention is shown. figure 1 The structure includes: a vacuum chamber 1, a main substrate 2 and two vibration isolation systems 3; the main substrate 2 and the vibration isolation system 3 are arranged on the inner wall of the vacuum chamber 1, and the vibration isolation system 3 is arranged on the vacuum chamber 1 and the vibration isolation system 3. Between the main substrate 2.
[0030] refer to figure 2 , figure 2 It schematically shows the first structural diagram of the vibration isolation device in the embodiment of the present inven...
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