Symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof

A symmetric, thermoelectric technology, which is used in thermal power measurement, TV, microstructure technology, etc., and can solve problems such as large volume, active detection, and hybrid integration.

Active Publication Date: 2020-04-21
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these standing wave meters exhibit disadvantages such as large size, active detection, hybrid integration, etc.

Method used

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  • Symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof
  • Symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof
  • Symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof

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Embodiment Construction

[0039] The specific implementation scheme of symmetrical thermoelectric MEMS microwave standing wave meter of the present invention is as follows:

[0040] A CPW transmission line 1, an ACPS transmission line 2, a symmetrical directional coupler 3, four identical MEMS air bridges 8 and four identical thermoelectric MEMS microwave power sensors 4 are arranged on a GaAs substrate 21, and are near a load resistor 15 The substrate is designed with a MEMS substrate film structure 22 .

[0041] The CPW transmission line 1 is placed horizontally on the GaAs substrate 21 as the input and output of the MEMS microwave standing wave meter; the CPW transmission line 1 at the coupling port and the isolation port is used to realize the transmission of the coupled microwave signal. The input port on the left is port one 31, the output port on the right is port two 32, the coupling port on the upper left is port three 33, the isolation port on the upper right is port four 34, and the coupling...

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Abstract

The invention discloses a symmetric thermoelectric MEMS microwave standing wave meter, which is characterized in that signal lines of ACPS transmission lines at the two ends are symmetrically distributed on the upper side and the lower side of a main transmission line to form a symmetric directional coupler, and incident microwave power and reflected microwave power are extracted to a coupling endand an isolation end of an upper branch and a lower branch respectively; a thermoelectric MEMS microwave power sensor is connected to the tail end of each CPW transmission line of the upper branch and the tail end of each CPW transmission line of the lower branch respectively to measure the microwave power of each port of the two branches, the average value of the measured output thermal voltageis obtained, more accurate incident microwave power and reflected microwave power can be obtained, and then the standing-wave ratio is obtained. If one branch circuit stops working, the other branch can still work normally, that is, the MEMS microwave standing wave meter can still carry out measurement, so that the failure rate is reduced. According to the symmetric thermoelectric MEMS microwave standing wave meter, the reliability of the MEMS microwave standing wave meter is improved, and the MEMS microwave standing wave meter has the characteristics of zero direct-current power consumption and compatibility with a gallium arsenide monolithic microwave integrated circuit process due to adoption of a fully passive structure.

Description

technical field [0001] The invention relates to a microwave standing wave meter for online detection of standing wave ratio and a preparation method thereof, in particular to a symmetrical thermoelectric MEMS microwave standing wave meter based on MEMS (Micro-Electro-Mechanical-System) technology and its preparation method. Preparation. Background technique [0002] In modern microwave high-density integrated microsystems, a microwave standing wave meter is a key component in the self-testing application of microwave system modules, and is used to characterize the standing wave ratio in microwave systems. Microwave high-density integrated microsystems require modules such as antennas and TR components to be highly integrated for micro-reconnaissance, interference, and frequency detection. As microwave systems become smaller and more integrated, highly integrated microsystems have large performance differences, are difficult to dismantle, and are difficult to measure, and lo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/08G01R21/02B81B7/02B81C1/00
CPCG01R29/0878G01R21/02B81B7/02B81C1/00539
Inventor 张志强孙国琛黄晓东韩磊
Owner SOUTHEAST UNIV
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