Hydrogen isotope crystallization height and surface roughness interference measurement device and method

Abstract

The invention discloses a hydrogen isotope crystallization height and surface roughness interference measurement device and method, and the device comprises an interference measurement system, a displacement system, and a computer processing module. The method comprises the following steps: in a microscopic observation mode, controlling a displacement system to scan and shoot a whole crystal growth surface, performing image splicing to obtain images of all regions, and determining an accurate position needing to be monitored; and aligning the observation field of view of the measurement systemwith a monitoring area, switching to an interference measurement mode, and realizing measurement of the growth height and the final growth state surface roughness of the area to be measured by usingan interferogram fringe phase measurement technology. By utilizing the device and the method provided by the invention, the non-contact measurement of the growth height and the surface roughness of the hydrogen isotope low-temperature crystal can be realized, the influence of vacuum chamber glass, strong reflection light of a growth substrate, boundary fracture in the growth process and the like on a common interference microscopic system is eliminated, and high-precision measurement is realized.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and in particular relates to a hydrogen isotope crystal height and surface roughness interference measurement device and method. Background technique [0002] In inertial confinement nuclear fusion, high-energy laser beams or ion beams are used to hit the fuel target with a diameter of millimeters. Through physical processes such as ablation and implosion on the surface of the target, the fuel in the target is finally fused to release energy. The fuel target pellet is composed of an outer spherical shell, an inner solid deuterium-tritium fuel layer and a gaseous deuterium-tritium layer in the center. The surface roughness of the solid deuterium-tritium fuel layer is one of the important factors affecting the nuclear fusion effect. In order to obtain a solid fuel layer with a smooth surface, research institutions at home and abroad are currently carrying out hydrogen isotope ...

AI Technical Summary

Problems solved by technology

This will lead to poor contrast of the interference fringes used in the measurement, making it difficult to achieve high-precision measurement

[0004] In addition, the light transmitted through the crystal and reflected by the flat substrate can greatly disturb the measurement

Using a phase-shifting interference microscope to measure it, the above problems are also unavoidable, and when the numerical aperture of the microscope objective lens increases, the measurement accuracy of the interference microscope will be affected

[0005] On the other hand, hydrogen isotope crystallization requires an ultra-low temperature vacuum environment, so its measurement needs to be carried out through an optical window, and the window glass will also affect the normal use of the above-mentioned equipment, and high-precision measurement cannot be achieved

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