Polishing-force-controlled flexible polishing tool

Abstract

A polishing-force-controlled flexible polishing tool comprises a flexible tool, a chuck base, a connecting plate, a speed reducer, a servo motor, a rack, a force sensor, a force control system and thelike; and the flexible tool is composed of a clamp, an elastic layer and polishing leather. The polishing force in the machining process is tested through the force sensor, the constant machining force is achieved through the force control system, and the high surface quality of an optical element is guaranteed through cooperation of the flexible layer and a polishing pad; intermediate frequencyerrors are prevented from being generated in the machining process; and the removal function can be adjusted in the machining process, the edge effect is reduced, and high-precision machining of the optical element is achieved.

Description

technical field [0001] The invention relates to the field of optical processing, in particular to a flexible polishing tool with polishing force control. The present invention uses a force sensor to test the polishing force during processing and realizes a constant processing force through a force control system, and uses a flexible layer and a polishing pad to cooperate to ensure high surface quality of the optical element. The flexible layer and the polishing pad cooperate to ensure the high surface quality of the optical element; Avoid intermediate frequency errors during processing; the removal function can be adjusted during processing to reduce edge effects and achieve high-precision processing of optical components. Background technique [0002] During the processing of optical components, there are extremely high requirements on the surface quality and surface shape accuracy of the components; in order to achieve full-spectrum processing, it is necessary to avoid sur...

AI Technical Summary

Problems solved by technology

The full-bore machining method generally cannot achieve relatively high surface quality and surface shape accuracy, and the processing process needs to rely on the experience of the processing personnel; the sub-caliber processing method, such as magnetorheological polishing, will generally inevitably produce intermediate frequency. Error; edge processing of small tool polishing and other processing methods is different from the center processing state, which is prone to edge effects; small tool polishing, airbag polishing and other processing methods mainly ensure constant polishing force by controlling air pressure during the processing process, and the general accuracy is not high.

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