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Chemical vapor deposition (CVD) outer tube and processing technology thereof

A chemical vapor deposition and processing technology, applied in the field of quartz, can solve the problems of usability and the outer tube can not meet the requirements of use, unfavorable operation, poor durability, etc. Effect

Pending Publication Date: 2020-04-10
北京凯德石英股份有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing chemical vapor deposition outer tube is small in size and simple in processing, but its durability is poor. Because the original head adopts a round head, it is not conducive to operation. At the same time, the original flange butt joint adopts a direct butt joint method, and the usability is as high as that of the outer tube. Less than the existing use requirements, for this reason the applicant specially designed a new type of chemical vapor deposition CVD outer tube according to the needs

Method used

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  • Chemical vapor deposition (CVD) outer tube and processing technology thereof

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Embodiment Construction

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on The embodiments of the present invention and all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] Such as figure 1 As shown, a chemical vapor deposition CVD outer tube includes a quartz plate 1, a butt joint outer tube 2, a top cover 3, a counterweight edge 4, an inner port 5, a quartz sheet 6, and an outer butt joint 7. The quartz plate 1 and The butt joint outer tube 2 is welded as an integral structure, and the front end of the butt joint outer tube 2 is fixed with a top cover 3 .

[0025] In this embodiment, the quartz plate 1 is...

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PUM

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Abstract

The invention discloses a chemical vapor deposition (CVD) outer tube and a processing technology thereof. The CVD outer tube comprises a quartz plate, a butt joint outer pipe, a top cover, a balance weight edge, an inner opening, a quartz sheet and an outer butt joint opening. The quartz plate and the butt joint outer pipe are welded into an integrated structure. The top cover is fixed to the front end of the butt joint outer pipe, the quartz plate is annular, the balance weight edge is fixedly arranged outside the quartz plate, the inner opening is formed in the quartz plate, the quartz sheetis fixed to the position, close to the inner opening, in the quartz plate, the quartz sheet is in lap joint with the inner inclined face of the quartz plate, and the quartz sheet and the quartz plateare welded and fixed.

Description

technical field [0001] The invention relates to the technical field of quartz, in particular to a chemical vapor deposition CVD outer tube and a processing technology thereof. Background technique [0002] The existing chemical vapor deposition outer tube is small in size and simple in processing, but its durability is poor. Because the original head adopts a round head, it is not conducive to operation. At the same time, the original flange butt joint adopts a direct butt joint method, and the usability is as high as that of the outer tube. It is less than the existing use requirements, so the applicant specially designed a new type of chemical vapor deposition CVD outer tube according to the needs. Contents of the invention [0003] The purpose of the present invention is to provide a chemical vapor deposition CVD outer tube and its processing technology, so as to solve the problems raised in the above-mentioned background technology. [0004] The object of the present ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00C23C16/44C23G1/02C21D1/26B08B3/08
CPCB08B3/08B23P15/00C21D1/26C23C16/44C23G1/02
Inventor 张忠恕王连连赵鹤陈强于洋冯继瑶张娟边占宁孙云涛李宝军张连兴王建立
Owner 北京凯德石英股份有限公司
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