Hard and brittle material complex component femtosecond laser precision forming processing system

Abstract

A hard and brittle material complex component femtosecond laser precision forming processing system comprises a femtosecond laser, a laser tuning module, a mechanical optical shutter, a laser polarization module, a variable-magnification beam expander, a plane reflector, an optical diffraction element, a filamentation modification module, a filamentation auxiliary piece, a special clamping tool, amulti-shaft linkage electric control displacement table, an industrial personal computer, a mechanical arm, a chemical corrosion pool and an alkaline neutralization pool. The femtosecond laser filamentation length and the diameter are regulated and controlled through the variable-magnification beam expander, the optical diffraction element and the filamentation modification module, and the largeratio of pit-depth to pit-diameter machining of the hard and brittle material is achieved; by means of the filamentation auxiliary piece, adverse effects of poor filamentation front end machining consistency are avoided; and through the mechanical optical shutter, the multi-shaft linkage electric control displacement table, the industrial personal computer and other optical electromechanical cooperation control, the complex component laser modification function is completed. The hard and brittle material complex component femtosecond laser precision forming processing system has the beneficialeffects that the ratio of pit-depth to pit-diameter machining is large, the machining quality is excellent, complex components can be formed, and fully automatic operation is achieved and has wide application prospects in the fields of aerospace, semiconductors, electronics industry and the like.

Description

technical field [0001] The invention belongs to the technical field of laser precision manufacturing, and in particular relates to a femtosecond laser precision forming processing system for complex components of hard and brittle materials based on filament modification and chemical corrosion. Background technique [0002] With a series of advantages such as stable performance, high mechanical strength, strong insulation performance, and good optical properties, hard and brittle materials such as lithium niobate crystals, quartz crystals, quartz glass, and tempered glass occupy an important position in aerospace, semiconductor, and electronics industries. important position. With the rapid development of the above-mentioned application fields, the requirements for forming dimensional accuracy and processing efficiency of complex components of hard and brittle materials are getting higher and higher. [0003] At present, the processing equipment for complex components of har...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose a femtosecond laser precision forming processing system for complex components of hard and brittle materials based on filament modification and chemical corrosion, so as to solve the problems of low dimensional accuracy and poor processing quality in the current equipment forming process existing in the prior art

Images