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Piezoelectric film, preparation method of piezoelectric film, and piezoelectric film sensor

A piezoelectric thin film and thin film technology, which is applied in the manufacture/assembly of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive devices, etc. To meet the needs of the use of piezoelectric film flexibility, the film is easy to crack and other problems, to achieve the effect of good piezoelectric performance, good piezoelectric performance and good flexibility

Pending Publication Date: 2020-02-04
INTERFACE TECH CHENGDU CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The PVDF piezoelectric film made by the traditional method is prone to brittleness, which cannot meet the needs of piezoelectric film flexibility.

Method used

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  • Piezoelectric film, preparation method of piezoelectric film, and piezoelectric film sensor
  • Piezoelectric film, preparation method of piezoelectric film, and piezoelectric film sensor
  • Piezoelectric film, preparation method of piezoelectric film, and piezoelectric film sensor

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preparation example Construction

[0026] see figure 1 , the preparation method of the piezoelectric thin film of an embodiment, comprises the following steps:

[0027] Step S110: Coating a solution containing a piezoelectric polymer and a solvent on the substrate to obtain a film, wherein the piezoelectric polymer is a copolymer of vinylidene fluoride and trifluoroethylene.

[0028] Specifically, in one embodiment, the piezoelectric polymer is a copolymer of vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)). In P(VDF-TrFE), the molar ratio of vinylidene fluoride to trifluoroethylene was 80:20. It can be understood that, in other embodiments, the molar ratio of vinylidene fluoride to trifluoroethylene is not limited to the above value, and may also be a copolymer of vinylidene fluoride and trifluoroethylene commonly used in the art.

[0029] Add trifluoroethylene to vinylidene fluoride, because the diameter of fluorine atom in trifluoroethylene is slightly larger than the diameter of hydrogen atom, afte...

Embodiment 1

[0053] The preparation process of the piezoelectric film of the present embodiment is specifically as follows:

[0054] (1) Coating a solution containing a copolymer of vinylidene fluoride and trifluoroethylene and DMAc on ITO glass to obtain a thin film.

[0055] (2) Annealing the film at 130° C. for 0.5 h, and then performing polarization treatment at room temperature with a polarization electric field of 5 kV and a polarization time of 10 min to obtain a piezoelectric film.

Embodiment 2

[0057] The preparation process of the piezoelectric film of the present embodiment is specifically as follows:

[0058] (1) Coating a solution containing a copolymer of vinylidene fluoride and trifluoroethylene and DMAc on ITO glass to obtain a thin film.

[0059] (2) Perform the first annealing treatment on the film at 125°C for 1 hour, then perform the second annealing treatment at 130°C for 20 minutes, and then conduct the polarization treatment on the annealed film at room temperature, and the polarization electric field is 8kV , the polarization time is 15min, and the piezoelectric film is obtained.

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Abstract

The invention relates to a piezoelectric film, a preparation method of the piezoelectric film, and a piezoelectric film sensor. The preparation method of the piezoelectric film comprises the steps of:coating solution containing a piezoelectric polymer and a solvent on a substrate, so that a film is obtained, wherein the piezoelectric polymer is a copolymer of vinylidene fluoride and trifluoroethylene; and annealing the film at 122-133 DEG C, so that the piezoelectric film is obtained. By means of the preparation method of the piezoelectric film in the invention, the piezoelectric film havinggood piezoelectric performance and better flexibility can be obtained.

Description

technical field [0001] The invention relates to the field of piezoelectric films, in particular to a piezoelectric film, a preparation method thereof and a piezoelectric film sensor. Background technique [0002] Due to its excellent piezoelectric properties, PVDF (polyvinylidene fluoride) can be used to make piezoelectric film sensors, that is, the film can generate corresponding charges after being pressed. Based on this principle, the application prospects of piezoelectric films are very broad. Many properties of PVDF are closely related to its crystal structure. The α-crystal form is the most common crystal form of PVDF. After high-temperature annealing and polarization treatment, β-phase PVDF with strong piezoelectric effect can be obtained. [0003] The PVDF piezoelectric film made by the traditional method is easy to be brittle and cracked, which cannot meet the flexibility requirements of the piezoelectric film. Contents of the invention [0004] Based on this, it...

Claims

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Application Information

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IPC IPC(8): H01L41/45H01L41/09
CPCH10N30/2047H10N30/098H10N30/045H10N30/857H10N30/077H10N30/078H10N30/302
Inventor 丁欢李韦坤马梦竹
Owner INTERFACE TECH CHENGDU CO LTD
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