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Beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof

A vertical cavity surface emission and beam shaping technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problems of complex manufacturing process, poor mechanical stability, difficult coupling efficiency, etc., and achieve simple manufacturing process and easy simulation calculation. Effect

Inactive Publication Date: 2020-01-10
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

After the completion of the VCSEL, the French National Center for Scientific Research successfully focused the output beam of the VCSEL by integrating Microoptical Electromechanical Microsystems (MOEMS), but its structure and manufacturing process are very complicated, and it is difficult to obtain a high coupling efficiency; The University of California, Berkeley designed a high-contrast metastructure (High-contrast metastructure, HCM) whose reflectivity varies with angle to replace the upper mirror of the VCSEL, and at the same time as a beam shaper to modulate the output beam, and obtained beam outputs with different far-field distributions, but its The suspended HCM is not only complicated in manufacturing process, but also poor in mechanical stability

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  • Beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof
  • Beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof
  • Beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof

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Embodiment Construction

[0025] The invention discloses a beam-shaping vertical-cavity surface-emitting laser integrated with a high-contrast grating and a simulation method thereof. The beam-shaping vertical-cavity surface-emitting laser is composed of a vertical-cavity surface-emitting laser and a high-contrast grating. The oxidized hole size of the cavity surface emitting laser obtains output beams of different shapes. The invention can achieve single-lobe, double-lobe and other beam outputs without resorting to an external beam shaping system.

[0026] Specifically, the present invention provides a beam-shaping vertical-cavity surface-emitting laser integrating a high-contrast grating, including:

[0027] The vertical cavity surface emitting laser includes a lower reflector, an active area, an oxidation hole and an upper reflector, and the lower reflector, the active area, the oxidation hole and the upper reflector are arranged adjacently in sequence;

[0028] A high-contrast grating located on t...

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Abstract

The invention discloses a beam shaping vertical cavity surface emitting laser integrated with a high-contrast grating and a simulation method thereof. The beam shaping vertical cavity surface emittinglaser is composed of the vertical cavity surface emitting laser and the high-contrast grating, and output beams in different shapes are obtained by adjusting a grating area and a size of an oxidationhole of the vertical cavity surface emitting laser. In the invention, single-lobe and double-lobe light beam output and the like can be obtained without help of an external light beam shaping system.

Description

technical field [0001] The invention relates to the field of semiconductor optoelectronics, in particular to a beam-shaping vertical-cavity surface-emitting laser integrated with a high-contrast grating and a simulation method thereof. Background technique [0002] With the continuous development of semiconductor laser technology, its application scenarios are becoming more and more diversified. In order to meet the needs of different applications, a special beam shaping system is usually required to shape the output beam of the laser. For example, in the field of material processing and laser medical applications, it is necessary to focus the output beam into a circular spot distributed as symmetrically as possible; in the transmission network, a beam splitter is required to split / combine optical signals. [0003] Vertical-cavity surface-emitting lasers (VCSELs) have the advantages of low cost, low power consumption, and easy packaging, and are widely used in data communica...

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Application Information

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IPC IPC(8): H01S5/183H01S5/00
CPCH01S5/0035H01S5/18302H01S5/18386
Inventor 邱平平李明阚强
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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