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Semiconductor crystal rod Notch forming center calibration device and method

A center calibration and semi-conductor technology, which is applied in the direction of grinding drive devices, manufacturing tools, grinding machine parts, etc., can solve the problems of low calibration efficiency, difficult calibration, and long center calibration time, and achieve convenient and reliable devices and calibration methods. Efficient and fast calibration effect

Pending Publication Date: 2019-12-20
QINGDAO GAOCE TECH CO LTD
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Problems solved by technology

[0003] At present, the existing grinding equipment in the industry uses trial grinding for center calibration, which is difficult to calibrate, resulting in long center calibration time, low calibration efficiency, and failure to maximize the use value of the equipment. At the same time, the calibration accuracy is low and cannot meet the grinding accuracy requirements.

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  • Semiconductor crystal rod Notch forming center calibration device and method
  • Semiconductor crystal rod Notch forming center calibration device and method
  • Semiconductor crystal rod Notch forming center calibration device and method

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Embodiment Construction

[0028] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in the present application, other similar embodiments obtained by persons of ordinary skill in the art without making creative efforts shall all fall within the protection scope of the present application. In addition, the directional terms mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only referring to the directions of the drawings. invent.

[0029] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments.

[0030] see Figure 1-Figure 6 , a center calibration device for opening Notch grooves in a semiconductor crystal ingot of the present invention, inclu...

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Abstract

The invention belongs to the technical field of silicon rod machining and particularly relates to a semiconductor crystal rod Notch forming center calibration device comprising a clamping device, a center measurement device and a V groove grinding device, and the center measurement device and the V groove grinding device are arranged on the two sides of the clamping device correspondingly. The invention further relates to a calibration method. Firstly, center calibration is conducted through the center measurement device and a high-precision center calibration rod, and then center calibrationis conducted through the V groove grinding device and the high-precision center calibration rod. Through the semiconductor crystal rod Notch forming center calibration device and method, the problem that when a Notch groove is formed in a semiconductor crystal rod, semiconductor grinding equipment cannot be calibrated by a tool is solved, and the method for calibration through the calibration device is convenient and reliable and is an effective method for fast calibrating the Notch groove.

Description

technical field [0001] The invention belongs to the technical field of silicon rod processing, and in particular relates to a center calibration device and method for opening Notch grooves of semiconductor crystal rods. Background technique [0002] Before slicing semiconductor ingots, it is necessary to open Notch grooves on the ingots. Notch grooves in semiconductor wafers refer to V-grooves with specified shapes and sizes intentionally processed on the periphery of silicon wafers. The diameter passing through the center of the V-groove is parallel to the specified low-index crystal orientation and is used as an identification mark. Notch grinding precision is very high, and the shape and position tolerance is required to be within a few wires. The accuracy of the grinding center position of the grinding wheel used for notch groove grinding directly determines the accuracy of notch opening, and the center calibration method is very important. [0003] At present, the exi...

Claims

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Application Information

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IPC IPC(8): B24B19/02B24B19/22B24B49/00B24B41/06B24B47/22
CPCB24B19/02B24B19/22B24B49/00B24B41/062B24B47/22
Inventor 徐公志郭世锋王永华尹美玲
Owner QINGDAO GAOCE TECH CO LTD
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