A kind of microscopic spectrum measurement device and method based on optical chip substrate

An optical chip and spectral measurement technology, applied in the field of microspectral analysis, can solve the problems of low analysis efficiency and slow collection speed, and achieve the effects of good scalability, simple structure and long service life

Active Publication Date: 2022-04-08
NANJING UNIV OF SCI & TECH
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Problems solved by technology

[0004] The purpose of the present invention is to provide a microspectral measurement device and method based on an optical chip substrate to solve the technical problems of slow collection speed and low analysis efficiency in traditional spectrum measurement

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  • A kind of microscopic spectrum measurement device and method based on optical chip substrate
  • A kind of microscopic spectrum measurement device and method based on optical chip substrate
  • A kind of microscopic spectrum measurement device and method based on optical chip substrate

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specific Embodiment 1

[0052] A microscopic spectrum measurement device based on an optical chip substrate includes an illumination laser light source 1, a beam expander lens 2, a near-end laser reflector 3, a focusing microscopic objective 4, a wide-spectrum coupling object-loading optical chip 5, and a collecting microscopic objective 6 , a dichroic mirror 7, an imaging lens 8 and an image sensor 9, wherein the wavelength of the illumination laser light source 1 is 532nm, which can excite carboxylic acid fluorescent molecules in the analyte. The wide-spectrum coupling object-loading optical chip 5 is composed of a polymer layer, a metal layer, a defect layer and a photonic crystal layer, wherein the polymer layer is PMMA with a thickness of 5nm; the metal layer material is silver with a thickness of 30nm; the defect layer is silicon dioxide, The thickness is 165nm; the photonic crystal layer is deposited alternately by silicon dioxide and silicon nitride, the thicknesses are respectively 125nm and ...

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Abstract

The invention discloses a microscopic spectrum measurement device and method based on an optical chip substrate. Microscope, dichroic mirror, imaging lens and CCD image sensor. The method is as follows: prepare a wide-spectrum coupling object-loading optical chip with dispersion function; the laser light emitted by the illumination laser source is expanded and then reflected and focused on the object to be measured on the chip by the near-end mirror and focusing microscope objective lens; The emitted signal will be bound to the surface of the wide-spectrum coupling object-carrying optical chip and exit downwards at multiple angles. After being received by the collecting microscope objective lens and reflected by the dichroic mirror, it will be imaged by the imaging lens on the image sensor. Calculated Get the spectral signal of the object to be measured. The invention solves the technical problems of slow collection speed and low analysis efficiency in traditional spectrum measurement.

Description

technical field [0001] The invention relates to the technical field of microspectral analysis, in particular to a microspectral measurement device and method based on an optical chip substrate. Background technique [0002] Integrated chip technology based on surface light field regulation has achieved a series of breakthroughs in the fields of semiconductors, micromachining, and metamaterials, and has gradually moved from front-end research to practical applications. The research combined with its directional transmission characteristics has also made breakthroughs in the field of microscopic imaging such as high-contrast imaging and dark-field imaging. Using the confinement effect of the surface waveguide, it can well realize the observation of the sample morphology at different depths, but it cannot effectively reflect the composition and quantitative analysis of the sample. Because of this, the imaging technology widely used in photochemistry and biomedicine is often un...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/64G01N21/65G01N21/25
CPCG01N21/6458G01N21/65G01N21/255
Inventor 陈漪恺陈芙莲张璐丁彬轩沈中华
Owner NANJING UNIV OF SCI & TECH
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