Application of cobalt-iron alloy in magnetic capacitors, magnetic capacitor unit, magnetic capacitor device and preparation method thereof

A technology of cobalt-iron alloy and magnetic capacitance, which is applied in the field of capacitors, can solve the problems of undetectable capacitance, etc., and achieve the effects of prolonged electrode life, excellent magnetic properties, and good magnetic properties

Inactive Publication Date: 2019-08-30
布驰(上海)磁电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at this stage, only the U.S. military is studying the subject of passive semiconductor magnetic capacitors, and there are still many technical problems in practical applications. In the prior art, cobalt materials including various alloy materials have not been used to make semiconductor magnetic capacitors. The report of the magnetic film material, and in fact the applicant has also gone through numerous attempts, using cobalt material to prepare the magnetic film material to realize the above-mentioned scheme, but the capacity of the capacitance is often not detected when the capacitance detection is performed, and the relevant in the prior art There is almost no reference technology and experience for passive semiconductor magnetic capacitors

Method used

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  • Application of cobalt-iron alloy in magnetic capacitors, magnetic capacitor unit, magnetic capacitor device and preparation method thereof
  • Application of cobalt-iron alloy in magnetic capacitors, magnetic capacitor unit, magnetic capacitor device and preparation method thereof
  • Application of cobalt-iron alloy in magnetic capacitors, magnetic capacitor unit, magnetic capacitor device and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] Embodiment 1 A magnetic capacitance unit

[0065] A magnetocapacitive unit such as figure 1 As shown, it is covered on the Si substrate 6, and includes from top to bottom: top electrode layer 1, magnetically conductive layer 2, insulating layer 3, magnetically conductive layer 4, and bottom electrode layer 5. The composition and thickness of each layer are as follows 1.

[0066] Table 1 Structural design of magnetic capacitance unit

[0067]

[0068]

[0069] Among them, the magnetoconductive layer 2 and the magnetoconductive layer 4 are composed of multi-layer nano-scale magnetic films with a total thickness of 150-250nm; the magnetic films of each layer are deposited by magnetron sputtering coating with a cobalt-iron alloy as the target material, and the thickness is 5-25 nm; in the cobalt-iron alloy target used, the atomic ratio of cobalt to iron is 6.5-7.2:3.5-2.8, preferably 7:3.

[0070] Preferably, the length of the magnetic capacitance unit is 1.0-2.0 μ...

Embodiment 2

[0072] Embodiment 2 A magnetic capacitance unit

[0073] Compared with Example 1, the difference is that the structure of the magnetoconductive layer is shown in Table 2 below. The magnetoconductive layer 2 and the magnetoconductive layer 4 are respectively composed of multilayer nanoscale CoFeB magnetic films, which are CoFeB synthesized by CoFe and B. The target is a deposited film with a thickness of 5-25nm deposited by magnetron sputtering coating.

[0074] The structure design of the magnetoconductive layer of table 2 embodiment 2

[0075]

Embodiment 3

[0076] Embodiment 3 A magnetic capacitance unit

[0077] Compared with Example 1, the difference is that the structures of the magnetoconductive layer 2 and the magnetoconductive layer 4 are shown in Table 3 below, which are formed by magnetron sputtering coating deposition using CoFe, TaO and CoFeB respectively.

[0078] The structural design of the magnetoconductive layer of embodiment 3

[0079]

[0080]

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Abstract

The invention discloses an application of a cobalt-iron alloy in magnetic capacitors, which refers to the use of a multilayer nano-scale magnetic film formed by magnetron sputtering coating with a cobalt-iron alloy as a target material as a magnetic conductive layer between the two electrodes of a magnetic capacitor. In the cobalt-iron alloy, the atomic ratio of cobalt to iron is (6.5-7.2):(3.5-2.8). The invention also discloses a magnetic capacitor unit and a magnetic capacitor device. A multilayer nano-scale film prepared by using a cobalt-iron alloy with an atomic ratio of (6.5-7.2):(3.5-2.8) as a target material and adopting the magnetron sputtering coating technology can maintain good magnetism through one time of magnetization and can also maintain good magnetism at high temperature.When used in semiconductor magnetic energy storage capacitors, the magnetic capacitor unit can store a large amount of electric energy through one time of activation. The cobalt-iron alloy can be used to develop passive magnetic energy super capacitors not needing reciprocating charging.

Description

[0001] The application of the present invention requires the name "a cobalt-iron alloy target material, a magnetically conductive layer, a magnetic capacitance unit, a magnetic energy chip and its preparation method", the application date is March 11, 2019, and the application number is 2019101791101, as an invention of the present invention Application of cobalt-iron alloys in magnetocapacitance, magnetocapacitance unit, magnetocapacitance device and the priority of its preparation method. technical field [0002] The invention belongs to the technical field of capacitors, and relates to the application of cobalt-iron alloys in magnetic capacitance, magnetic capacitance units, magnetic capacitance devices and preparation methods thereof. Background technique [0003] In modern society, energy storage components can be seen everywhere, such as capacitors in circuits and battery components used in portable devices. However, there are some problems with existing energy storage ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/64
CPCH01L28/40
Inventor 朱广琼燕俊羽高湛勋
Owner 布驰(上海)磁电科技有限公司
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