Preparation method of microelectrode diaphragm
A technology of micro-electrodes and membranes, applied in electrodes, electrotherapy, printed circuit manufacturing, etc., can solve the problems of complex micro-electrode preparation process
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[0050] Referring to Figures 1 to 6, the present embodiment provides a method for preparing a microelectrode membrane, and the product form of the microelectrode membrane prepared by this method can be found in Figure 3f , Figure 3g , Figure 4 . see Figure 5 , the method can include:
[0051] Step 11, forming at least one groove 40 on the temporary substrate 04, see Figure 3a .
[0052] In this step, a patterning process may be used to form grooves 40 on the temporary substrate 04 , wherein the process parameters such as the shape and quantity of the grooves 40 may be set according to actual needs.
[0053] Step 12, forming a microelectrode implant 011 in the groove 40, see Figure 3b .
[0054] Step 13, use the microelectrode crystal planting 011 to grow in the groove 40 to form the microelectrode 01, see Figure 3c .
[0055] In this step, the microelectrode 011 grows in the groove 40 , so the shape of the formed microelectrode 01 is the same as that of the groo...
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