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Contact linear concentration sensor based on array waveguide grating structure and fluid detecting method thereof

A technology of arrayed waveguide grating and concentration sensor, which is applied in the direction of phase influence characteristic measurement, instrument, measurement device, etc., can solve problems such as being unfavorable for real-time sensing, and achieve the effect of accurate results

Inactive Publication Date: 2019-07-19
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In these methods of measuring liquid concentration, the photoelectric method concentration sensor detects the change of the liquid refractive index through the quadratic relationship between the output light intensity and the liquid refractive index, and then detects the liquid concentration, and the ultrasonic grating method concentration sensor mainly uses the change of ultrasonic velocity To detect changes in liquid concentration, the relationship between liquid concentration and ultrasonic velocity is also a quadratic relationship, both of which belong to nonlinear sensing; the specific gravity method needs to extract samples for concentration measurement, which is not conducive to real-time sensing

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  • Contact linear concentration sensor based on array waveguide grating structure and fluid detecting method thereof
  • Contact linear concentration sensor based on array waveguide grating structure and fluid detecting method thereof
  • Contact linear concentration sensor based on array waveguide grating structure and fluid detecting method thereof

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Embodiment 1

[0045] A contact-type linear concentration sensor based on an arrayed waveguide grating structure, such as figure 2 and image 3 As shown, it includes a broadband optical signal input module 11, an arrayed waveguide grating, and a spectral signal detection module 12 connected in sequence; the broadband optical signal input module 11 integrates a broadband halogen fiber optic illuminator to provide a broadband light source; the arrayed waveguide grating It is used to correspond the change of fluid concentration to the drift of its own central wavelength; the spectral signal detection module 12 integrates a small CCD spectrometer inside, which is used to detect the drift of the output spectrum of the arrayed waveguide grating;

[0046] The single-mode waveguide includes a substrate 3 , a lower confinement layer 2 , a waveguide core layer 4 and an upper confinement layer 1 sequentially from bottom to top. The arrayed waveguide grating includes sequentially connected input chann...

Embodiment 2

[0051] A kind of contact type linear concentration sensor based on the arrayed waveguide grating structure described in embodiment 1, such as figure 1 As shown, the difference is that the structural size of the waveguide core layer 4 is designed to form a single-mode waveguide. The upper confinement layer 1 is the fluid-filled layer to be tested.

[0052] The material of the substrate 3 is silicon, silicon dioxide or polymethyl methacrylate.

[0053] Materials such as silicon, silicon dioxide, and polymethyl methacrylate have stable physical and chemical properties, and the preparation process is relatively mature, all of which are feasible choices for the preparation of optical waveguide devices.

[0054] The single-mode waveguide structure is a strip waveguide or a ridge waveguide, the width of the core layer of the single-mode waveguide is 0.5 μm-8 μm, and the thickness of the core layer of the single-mode waveguide is 0.5 μm-8 μm.

Embodiment 3

[0056] According to the contact linear concentration sensor based on the arrayed waveguide grating structure described in Embodiment 2, the difference is that the width of the core layer of the single-mode waveguide is 2 μm, and the thickness of the core layer of the single-mode waveguide is 1 μm.

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Abstract

The present invention relates to a contact linear concentration sensor based on an array waveguide grating structure and a fluid detecting method thereof. The sensor comprises a wide-spectrum opticalsignal input module, an array waveguide grating composed of a specific number of single-mode waveguides, a wide-spectrum optical signal output module and a spectral signal detecting module. An inverted triangle region to which the specific number of single-mode waveguides forming the array waveguide grating belong is used as a contact detecting region of a fluid medium concentration. The contact linear concentration sensor ingeniously utilizes the wavelength-sensitive splitting characteristic of the array waveguide grating. Namely, the change of the effective refractive index of a waveguide core layer changes a phase difference of light of different wavelengths in adjacent waveguides. After output by an output channel waveguide, the effective refractive indexes of different waveguide corelayers correspond to different center wavelengths, and the function of detecting the fluid concentration of a device is realized. The contact linear concentration sensor of the present invention is based on a refractive index sensitive unit in a shape of an inverted triangle, so that the phase change caused by the change of the refractive index can be linearly amplified, and the linear detection of the fluid concentration of the device is realized.

Description

technical field [0001] The invention relates to a contact type linear concentration sensor based on an arrayed waveguide grating structure and a fluid detection method thereof, belonging to the technical field of fluid concentration detection. Background technique [0002] With the progress of society and the continuous development of science and technology, environmental endocrine disruptors can cause acid rain, which has become another major environmental problem. It belongs to the third generation of environmental pollution and affects human health just like the greenhouse effect, global warming and ozone layer destruction. , a threat to normal human activities. Moreover, while modern industries such as industrial processing bring convenience to our lives, environmental pollution, mainly industrial wastes, has brought serious impacts on people's lives. Among the three, waste gas will cause environmental problems such as the greenhouse effect, while waste water will direc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/84G01N21/41G01N21/01
CPCG01N21/01G01N21/41G01N21/4133G01N21/84G01N2021/0112
Inventor 尹锐李景垚季伟黄庆捷
Owner SHANDONG UNIV
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