Micro-range measurement method based on Fraunhofer diffraction

Abstract

The invention, which belongs to the technical field of measuring the diffraction width by diffraction of light, provides a micro-range measurement method based on Fraunhofer diffraction. Color information at a light intensity peak of a diffraction image, a light intensity value mode, the position of a peak point, and corresponding row and column vectors are obtained by using a maximum value searchfunction being find function; a theoretical diffraction curve is generated based on the color information at the light intensity peak, the row and column vectors of the peak point, and a diffractionequivalent focal length and exploration is performed; and the diffraction width of a diffraction object generating Fraunhofer diffraction is explored continuously based on a pseudo-dichotomy algorithmand an optimal theoretical diffraction curve is determined finally, so that the diffraction width corresponding to the optimal theoretical diffraction curve is an actual diffraction width. Therefore,the diffraction width value of the diffraction occurence can be obtained based on the Fraunhofer diffraction image and the calculation efficiency is high.

Description

technical field [0001] The invention relates to the technical field of measuring diffraction width by light diffraction, in particular to a macro-distance measurement method based on Fraunhofer diffraction. Background technique [0002] In optics, Fraunhofer diffraction (named after Joseph von Fraunhofer), also known as far-field diffraction, is a type of wave diffraction that occurs when a field wave passes through a circular hole or slit, resulting in the observed The size of the image changes, which is caused by the far-field position of the observation point and the nature of the diffracted wave going out through the circular hole or slit to become a plane wave. [0003] With the advancement of science and technology, the research on the microcosm continues to deepen, and the processing of various precision instruments needs to be tested and monitored. There are protrusions or cracks in the tiny parts in precision instruments. Due to the extremely small size of the tiny...

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Problems solved by technology

[0004] According to the existing theoretical level, it is impossible to inversely deduce the occurrence conditions of diffraction from the diffraction image, because the inverse operation process involves a large number of partial differential equation solving problems, and the calculation needs to consume a lot of time and computer computing power, and there are It is very likely that it cannot be solved. In addition, its requirements for calculating the light intensity of the source are extremely demanding, which is not a level that ordinary cheap CMOS can detect

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