Symmetric spatial three-dimensional micro manipulator with three-stage motion amplifying mechanism

Abstract

The invention discloses a symmetric spatial three-dimensional micro manipulator with a three-stage motion amplifying mechanism. The micro manipulator is small in size, compact in structure, stable andreliable in clamping force and high in movement precision. The micro manipulator is composed of a base and a plurality of amplification clamping modules, wherein each amplification clamping module comprises a piezoelectric ceramic driver, a bridge type displacement amplification mechanism, two lever displacement amplification mechanisms, a Z-shaped beam displacement amplification mechanism, two flexible guide mechanisms and a clamping jaw; the piezoelectric ceramic driver is arranged between the base and the movable end of the bridge type displacement amplification mechanism; and the piezoelectric ceramic driver drives the movable end of the bridge type displacement amplification mechanism, the output end of the bridge type displacement amplification mechanism drives the input ends of thelever displacement amplification mechanisms, the output end of each lever displacement amplification mechanism drives the input end of the Z-shaped beam displacement amplification mechanism, and theoutput end of the Z-shaped beam displacement amplification mechanism is fixedly connected with the clamping jaw. The micro manipulator is compact in structure, stable and reliable in clamping force, low in cost and high in movement precision.

Description

technical field [0001] The invention belongs to the technical field of micro-nano robots, and more specifically relates to a symmetrical three-dimensional micro-manipulator with a three-stage motion amplification mechanism. Background technique [0002] In recent years, with the rapid development of microelectronics, life science and robotics, the application of micro-nano devices has become more and more extensive. The integration of micro-nano manufacturing, packaging and testing, and precision operation with other basic disciplines has become increasingly close, and has become one of the important cutting-edge science and technology leading scientific development and engineering applications, and has attracted extensive attention from many experts and scholars. Micro-nano manipulation technology has been widely used in many fields such as bioengineering, micro-device bonding, optical device assembly and optical fiber docking. [0003] As the end effector of the micro-ope...

AI Technical Summary

Problems solved by technology

The traditional micro-manipulator only has a two-dimensional planar structure, and there are only two grippers. When combined with the micro-manipulator robot arm, it needs to use specific bases and other devices. The clamping direction is generally perpendicular to the axis of the robot arm, and generally can only The "pinch" action limits the application range of micro-manipulation robots and increases the difficulty of manipulator motion control

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