A high-sensitivity, high-frequency response, and overload-resistant silicon carbide high-temperature vibration sensor

Abstract

The invention discloses a high-sensitivity, high-frequency response, and overload-resistant silicon carbide high-temperature vibration sensor, which includes a silicon carbide chip, a silicon carbide bonding sheet, a thermal insulation layer, a packaging shell and a Kovar pin; the silicon carbide chip includes a supporting sheet, a cantilever beam and a mass block; the supporting sheet and the silicon carbide bonding sheet form a bonding body; the mass block and the cantilever beam are arranged in the cavity of the bonding body, and a chip circuit is arranged on the cantilever beam ; The Kovar pins extend into the bonding compound along the through holes arranged on the package shell, the heat insulating layer and the silicon carbide bonding sheet, and are connected with the chip circuit. The invention proposes that the high-temperature vibration sensor has the characteristics of high sensitivity, high-frequency response, and overload resistance, and can realize accurate and timely measurement of vibration signals in a high-temperature environment.

Description

technical field [0001] The invention relates to the technical field of vibration sensors, in particular to a silicon carbide high temperature vibration sensor with high sensitivity, high frequency response and anti-overload. Background technique [0002] Vibration measurement in high temperature environment is widely used in aerospace, petrochemical, automobile industry and other fields, such as vibration measurement of aero-engine combustion chamber, vibration monitoring of nuclear reactor equipment, oil drilling safety monitoring, etc. At present, vibration sensors mainly include piezoresistive, capacitive, resonant, etc., but due to the working principle of the sensor, material characteristics, and packaging technology, the temperature resistance of the sensor is limited, and the operating temperature of the sensor is generally low. Meet the requirements for normal operation in high temperature environments above 600°C; in addition, the contradiction between sensor sensit...

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Problems solved by technology

At present, vibration sensors mainly include piezoresistive, capacitive, resonant, etc., but due to the working principle of the sensor, material characteristics, and packaging technology, the temperature resistance of the sensor is limited, and the operating temperature of the sensor is generally low. Meet the requirements for normal operation in high temperature environments above 600°C; in addition, the contradiction between sensor sensitivity and stiffness has always been a key issue limiting the performance improvement of piezoresistive vibration sensors; and in many high-temperature application environments mentioned above, The sensor must have a good anti-overload ability to effectively resist unexpected high-frequency, high-energy impacts and ensure that it is not damaged

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