Single and dual axis magnetic field sensor, preparation method thereof and equipment

Abstract

The embodiment of the invention provides a single and dual axis magnetic field sensor, a preparation method thereof and equipment. The single axis sensor comprises a first Wheatstone bridge located ona substrate, the first Wheatstone bridge comprises two first magnetoresistive module groups and two second magnetoresistive module groups; the two first magnetoresistive module groups are located onfirst opposite bridge arms of the first Wheatstone bridge, and the reference layer magnetization directions of first magnetoresistive modules in each first magnetoresistive module group are the same with the first direction of the first sensing axis of the single-axis magnetic field sensor; the two second magnetoresistive module groups are located on second opposite bridge arms of the first Wheatstone bridge, and each second magnetoresistive module group includes two second magnetoresistive modules connected in series; the angle bisector of a first included angle formed by the reference layermagnetization directions of the two second magnetoresistive modules is parallel to the first sensing axis; the first included angle is greater than 0 and smaller than 180 degrees; and the reference layer magnetization directions of the first magnetoresistive module and the second magnetoresistive module are perpendicular to respective easy magnetization axes. According to the technical scheme, thecomplexity of the preparation process of the single-axis magnetic field sensor can be reduced.

Description

Technical field [0001] This application relates to the field of semiconductor technology, and in particular to a single-axis and dual-axis magnetic field sensor and its manufacturing method and equipment. Background technique [0002] Magnetic field sensors are mainly used to detect the presence, strength, direction and change of the magnetic field. In addition to directly measuring the magnetic field, magnetic field sensors also provide a wide range of solutions for the measurement of other physical quantities, such as current, linear displacement, linear velocity, angular displacement, angular velocity, acceleration, etc. At present, the types of magnetic field sensors that have been used include Hall sensors, anisotropic (AMR) sensors, giant magnetoresistance (GMR) sensors, tunneling magnetoresistance (TMR) sensors, and so on. [0003] At present, when manufacturing a single-axis magnetic field sensor, a half Wheatstone bridge structure is usually used. In the prior art, the s...

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Problems solved by technology

[0004] The present application provides a single-axis and double-axis magnetic field sensor and its preparation method and equipment, so as to reduce the problems such as the complicated preparation process of the single-axis magnetic field sensor in the prior art

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