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Method and device for recycling integrated high-purity nitrogen and argon

A high-purity nitrogen and argon technology, applied in refrigeration and liquefaction, lighting and heating equipment, liquefaction, etc., can solve problems such as inapplicable argon atmospheric pressure out of the tower, reduce operating costs, simplify processes and operations, and improve The effect of recovery

Inactive Publication Date: 2019-04-16
上海联风能源科技有限公司
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Problems solved by technology

[0008] In the patent "A Device and Method for Improving Argon Recovery Rate" (Application No.: CN201810612288.6), the reflux expansion is used, which is suitable for the case of argon exiting the tower with pressure, not suitable for argon exiting the tower under normal pressure

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  • Method and device for recycling integrated high-purity nitrogen and argon

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Embodiment Construction

[0040] In the following, the present invention will be described in detail and specifically through specific examples, so as to better understand the present invention, but the following examples do not limit the scope of the present invention.

[0041] as attached figure 1 As shown, the pressure of recovering argon (O2<~0.4%, N2<~1.5%, CO:~1500ppm, the rest is Ar) is very low, first pressurized to ~0.5-0.75MPa (A ) and remove oil and dust, it passes through GAr-101 and enters carbon monoxide remover 2. A catalyst is loaded in the carbon monoxide remover 2, and carbon monoxide is catalyzed into carbon dioxide through a catalytic reaction. CO outlet content <1ppm. The argon gas with CO removed comes out through the GAr-102 pipeline and enters the cooler I3 to cool to about 40°C. After being mixed with the added hydrogen in the GAr-103, it enters the deaerator 4. In the deaerator 4, oxygen and hydrogen are generated The reaction produces water and releases heat. The temperatu...

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Abstract

The invention discloses a method and device for recycling integrated high-purity nitrogen and argon. According to the method, a connection effect of an auxiliary condensing evaporator is utilized; cold energy exchange is performed between an argon recycling flow path and an air and nitrogen flow path; excessive cold energy generated by an expander is conveyed to the argon recycling flow path, so that the amount of liquid argon added externally can be obviously lowered, and operation cost of the equipment is lowered; meanwhile, convenience that liquid argon is provided on site is utilized, andcold energy is provided by liquid argon; then nitrogen and hydrogen are removed with a low-temperature distillation method; the recycling rate of argon and the utilization rate of hydrogen are improved; the procedure and operation of low-temperature distillation are simplified; operation energy consumption is lowered; furthermore, the integrated air and nitrogen flow path is utilized, and cold energy is generated by the expander, so that nitrogen is generated in a cold box; limitation of regenerated air can be lowered; and the extraction rate of recycled argon is improved.

Description

technical field [0001] The invention relates to a method for recovering argon, in particular to a method and device for integrating high-purity nitrogen and argon recovery. Background technique [0002] The Czochralski method (Czochralski method) is the main method for producing single crystal silicon, and 70% to 80% of the world's single crystal silicon is produced by the Czochralski method. The most commonly used process for producing single crystal silicon by the Czochralski method is a decompression crystal pulling process that is similar to a vacuum process and a flowing atmosphere process; High-purity argon is introduced into the furnace, and the vacuum pump continuously pumps argon from the furnace to keep the vacuum in the furnace stable at about 20 torr. This process has both the characteristics of vacuum technology and the characteristics of flow atmosphere technology. Vacuum pumps for decompression crystal pulling process generally use slide valve pumps, which ar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F25J3/08F25J3/04
CPCF25J3/044F25J3/04787F25J3/04884F25J3/08F25J2215/58F25J2215/42F25J2220/02F25J2260/02F25J2245/58F25J3/04296F25J2205/04F25J2200/72F25J3/04612F25J2270/904F25J2210/58F25J2205/82F25J2205/40F25J2200/50F25J2200/02F25J2250/20
Inventor 郝文炳
Owner 上海联风能源科技有限公司
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