A high-precision large working distance self-collimation three-dimensional angle measurement device and method

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a high-precision large working distance self-collimation three-dimensional angle measuring device and method; the device consists of a light source, a beam splitter, an image sensor, a collimating mirror, and a fixed plane mirror and a cooperative target; the method divides the measurement beam into two mutually perpendicular measurement beams through the cooperative target, and returns after being reflected by the fixed plane mirror and the cooperative target respectively, and forms respective images on the image sensor respectively, using the two images The position solution calculates the pitch angle, yaw angle and roll angle of the cooperative target relative to the optical axis, so that it has the ability to detect the three-dimensional rotation angle of the measured object space; since the present invention uses the principle of optical lever amplification for the roll angle, and the pitch angle It is consistent with the measurement principle of the yaw angle, so it has the technical advantage of high precision and large working distance for three-dimensional angle measurement, and then has the advantage of increasing the measurement accuracy at the same working distance, or increasing the working distance at the same measurement accuracy; in addition, The cooperative target designed in the present invention has the technical advantages of simple structure and low manufacturing cost.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a high-precision large working distance self-collimation three-dimensional angle measurement device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision self-collimation three-dimensional angle measurement technology at large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of autocollimator and circular grating can measure any line angle; the combination of autocollimation technology and polyhedral prism can measure surface angle and circular division; the maximum working distance is from several meters Up t...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problem that the traditional self-collimation angle measurement device cannot measure the rotation angle of the measured object around the optical axis, the present invention discloses a high-precision and large-working-distance self-collimation three-dimensional angle measurement device and method. Compared with the direct measuring device, it has the technical advantage of simultaneously measuring the three-dimensional angle around the three-axis rotation angle in the measured object space under the same measurement accuracy and working distance; and compared with other self-collimating three-dimensional angle measuring devices, in Both have the technical advantages of high precision and large working distance in the measurement of the rotation angle around the optical axis under the condition of simultaneously measuring the three-dimensional angle of the rotation angle around the three axes in the measured object space

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