Auto-collimation three-dimensional angle measuring device and method based on polarizing beam splitting

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to an auto-collimation three-dimensional angle measuring device andmethod based on polarizing beam splitting. The device is composed of a light source, a polarizer, a beam splitter, a polarizing beam splitter, image sensors, a collimating mirror, a fixed plane mirror and a cooperative target. According to the method, a measuring beam is divided into two mutually perpendicular measuring light by the cooperative target, the measuring light returns after being reflected by the fixed plane mirror and the cooperative target, and corresponding images are separately formed on the image sensors; and the positions of the two images are adopted to calculate a pitch angle, a yaw angle and a roll angle of the cooperative target with respect to an optical axis, so that a capability of detecting a three-dimensional corner of the measured object space. Since the principle of optical lever amplification is adopted to the roll angle and is consistent with the measurement principle of the pitch angle and the yaw angle, therefore, the technical advantages of high precision and large working distance for the three-dimensional angle measurement are achieved, and the advantage that the measurement accuracy is increased under the same working distance or the working distance is increased under the same measurement precision is achieved; two measuring light spots are received by two image sensors, the requirements for the subsequent image processing technique is reduced, and the frequency response of the measuring device is improved; and in addition, the designed cooperative target has the technical advantages of simple structure and low production cost.

Description

Technical field [0001] The invention belongs to the technical field of precision measurement, and specifically relates to a device and method for auto-collimating three-dimensional angles based on polarization splitting. Background technique [0002] In the field of precision measurement technology, optical engineering, cutting-edge scientific experimentation, and high-end precision equipment manufacturing, there is an urgent need for a large working range and high-precision auto-collimating three-dimensional angle measurement technology at a large working distance. It supports the development of technology and equipment in the above-mentioned fields. [0003] In the field of precision measurement technology and instruments, the combination of autocollimator and circular grating can measure any line angle; the combination of autocollimation technology and polyhedral prism can measure face angle and circle index measurement; the maximum working distance is from a few meters Up to h...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problem that the traditional self-collimation angle measurement device cannot measure the rotation angle of the measured object around the optical axis, the present invention discloses a three-dimensional self-collimation angle measurement device and method based on polarization splitting, which is the same as the traditional self-collimation measurement Compared with other self-collimating three-dimensional angle measuring devices, it has the technical advantage of simultaneously measuring three-dimensional angles around three-axis rotation angles in the measured object space under the same measurement accuracy and working distance; Under the condition of measuring the three-dimensional angle of the rotation angle around the three axes in the measured object space at the same time, it has the technical advantages of high precision, high frequency response and large working distance in the roll angle measurement around the optical axis direction.

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