A three-dimensional angle measurement device and method based on dual-wavelength spectroscopic self-collimation

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a three-dimensional angle measurement device and method based on dual-wavelength spectroscopic self-collimation; the device consists of a light source, a beam splitter, a transmissive collimator, a fixed mirror, and a cooperative target , green light filter, red light filter and RGB color image sensor; the filter and the cooperative target in this method make the measurement beam divided into red and green measurement light, which are respectively reflected by the fixed plane reflector and the cooperative target After returning, the respective images are formed on the image sensor, and the pitch angle, yaw angle, and roll angle of the cooperative target relative to the optical axis are calculated by using the two image positions, so as to have the ability to detect the three-dimensional rotation angle of the measured object space; The present invention adopts the optical lever amplification principle for the roll angle, which is consistent with the measurement principle of the pitch angle and yaw angle. Therefore, it has the technical advantage of high precision and large working distance for three-dimensional angle measurement, and has the ability to increase the measurement under the same working distance. Accuracy, or the advantage of increasing the working distance under the same measurement accuracy; the RGB color image sensor receives two measurement spots, which reduces the requirements for subsequent image processing technology and improves the frequency response of the measurement device. In addition, the cooperative target designed in the present invention has the technical advantages of simple structure and low production cost.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a three-dimensional angle measurement device and method based on dual-wavelength spectroscopic self-collimation. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision self-collimation three-dimensional angle measurement technology at large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of autocollimator and circular grating can measure any line angle; the combination of autocollimation technology and polyhedral prism can measure surface angle and circular division; the maximum working distance is from several meters Up ...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problem that the traditional self-collimation angle measuring device cannot measure the rotation angle of the measured object around the optical axis, the present invention discloses a three-dimensional angle measuring device and method based on dual-wavelength spectroscopic self-collimation, which is similar to the traditional self-collimation Compared with the measuring device, it has the technical advantage of simultaneously measuring the three-dimensional angle of the three-axis rotation angle in the measured object space under the same measurement accuracy and working distance; Under the condition of simultaneously measuring the three-dimensional angle of the rotation angle around the three axes in the measured object space, it has the technical advantages of high precision, high frequency response, and large working distance in the roll angle measurement around the optical axis.

Images