High-precision large-working-distance auto-collimation three-dimensional angle measuring device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a high-precision large-working-distance auto-collimation three-dimensional angle measuring device and method. The device is composed of a light source, a beam splitter, image sensors, a collimating mirror, a fixed plane mirror and a cooperative target. According to the method, a measuring beam is divided into two mutually perpendicular measuring light by the cooperative target, the measuring light returns after being reflected by the fixed plane mirror and thecooperative target, and corresponding images are separately formed on the image sensors; and the positions of the two images are adopted to calculate a pitch angle, a yaw angle and a roll angle of the cooperative target with respect to an optical axis, so that a capability of detecting a three-dimensional corner of the measured object space. Since the principle of optical lever amplification is adopted to the roll angle and is consistent with the measurement principle of the pitch angle and the yaw angle, therefore, the technical advantages of high precision and large working distance for thethree-dimensional angle measurement are achieved, and the advantage that the measurement accuracy is increased under the same working distance or the working distance is increased under the same measurement precision is achieved; and in addition, the designed cooperative target has the technical advantages of simple structure and low production cost.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a high-precision large working distance self-collimation three-dimensional angle measurement device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision self-collimation three-dimensional angle measurement technology at large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of autocollimator and circular grating can measure any line angle; the combination of autocollimation technology and polyhedral prism can measure surface angle and circular division; the maximum working distance is from several meters Up t...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problem that the traditional self-collimation angle measurement device cannot measure the rotation angle of the measured object around the optical axis, the present invention discloses a high-precision and large-working-distance self-collimation three-dimensional angle measurement device and method. Compared with the direct measuring device, it has the technical advantage of simultaneously measuring the three-dimensional angle around the three-axis rotation angle in the measured object space under the same measurement accuracy and working distance; and compared with other self-collimating three-dimensional angle measuring devices, in Both have the technical advantages of high precision and large working distance in the measurement of the rotation angle around the optical axis under the condition of simultaneously measuring the three-dimensional angle of the rotation angle around the three axes in the measured object space

Images