PE-reinforced multi-source two-dimensional material preparation device and working method thereof

Abstract

The invention discloses a PE-reinforced multi-source two-dimensional material preparation device and a working method thereof. The preparation device comprises a control area and a reaction area, wherein the reaction area is arranged at the upper part of the control area, the control area comprises a console, a radio frequency generator, a vacuum acquisition pump, and an industrial control computer, the radio frequency generator and the vacuum acquisition pump are arranged at one side of the console, the industrial control computer is arranged at the middle area of the console, and the other side of the console is provided with a vacuum gauge. The reaction area comprises a reaction table, a PE coupling source, a heating reactor, a solid source placing zone, and a quartz cavity, and a reaction table is fixed on the top of the console. A reverse low-temperature sublimation gas is used as a carrier, the secondary reaction of a solid source on a substrate is carried out, so that the growthprocess is well controlled, the pyrolysis temperature of the gas source is less than 400 DEG C through PE reinforcement, and the solid source is placed in an independently designed area and the sublimation temperature is not affected by the reaction zone.

Description

technical field [0001] The invention relates to the field of two-dimensional material processing equipment, in particular to a PE-enhanced multi-source two-dimensional material preparation equipment and a working method thereof. Background technique [0002] Two-dimensional materials are a kind of new materials. At present, only a few countries have carried out basic research on two-dimensional materials. Two-dimensional materials are another hot topic after graphene. Two-dimensional materials are composed of a single layer or a few layers of atoms or molecular layers. The layers are connected by strong covalent bonds or ionic bonds, while the layers are combined by van der Waals forces with weaker forces. Due to the structure Unique and exotic features and functions. Currently, two-dimensional materials mainly include graphene (GN), topological insulators (TI), transition metal chalcogenides (TMDCs), black phosphorus (BP), etc. [0003] The preparation sources of two-dime...

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Problems solved by technology

[0003] The preparation sources of two-dimensional materials are divided into three types: solid source, liquid source, and gas source. The physical properties of the material itself vary greatly. Traditional chemical vapor deposition (CVD) equipment cannot meet the needs of process production.

In the existing CVD, the cracking temperature of the gaseous source needs to be above 800°C, the sublimation temperature of the solid state is only about 200°C, and the growth temperature of the two-dimensional material cannot be higher than 600°C, so that the growth and reaction of the three cannot be realized in theory. Interaction of gas low temperature cracking and high temperature

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