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Aluminum nitride powder as well as preparation method and application thereof

An aluminum nitride and powder technology, applied in the field of aluminum nitride powder and its preparation, can solve the problems of insufficient carbothermic reduction reaction, affecting the contact of reaction gas, and poor gas path, etc., and achieves easy batch-to-batch performance. The effect of controlling, improving process capacity, and mixing fully and uniformly

Inactive Publication Date: 2019-03-08
NO 43 INST OF CHINA ELECTRONICS TECH GRP CETC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the accumulation of a large number of reaction raw materials in the process, it is easy to cause local gas passages to be unsmooth, resulting in insufficient reaction, especially in the continuous synthesis process of aluminum nitride powder prepared by carbothermal reduction method, due to the accumulation of materials, the flow of nitrogen gas may be There will be local obstruction, and a large amount of CO will be generated during the reaction process. If it cannot be taken away by the nitrogen flow in time, it will also affect the contact between the reaction gas and the material. These problems will cause insufficient carbothermal reduction reaction, resulting in final nitriding The purity of aluminum powder is low

Method used

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  • Aluminum nitride powder as well as preparation method and application thereof
  • Aluminum nitride powder as well as preparation method and application thereof
  • Aluminum nitride powder as well as preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] a. Add α-Al 2 o 3 The particles and petroleum carbon black are put into a dry ball mill for ball milling for 2 hours according to the mass ratio of 2:1 to obtain a mixed powder;

[0035] b. Mix and granulate the mixed powder, PVA and deionized water according to the mass ratio of 10:1.5:7, put the granulated particles into a drying furnace for debinding, and prepare a precursor with an average particle size of 2-10mm particles;

[0036] c. Send the precursor particles into a vertical graphite continuous synthesis furnace for continuous reaction in a nitrogen atmosphere to produce carbon-containing aluminum nitride particles, wherein the reaction temperature in the furnace is 1600 ° C, and the pressure in the furnace is 1000 Pa; The bulk particles naturally fall through the high temperature zone in the furnace from top to bottom, the residence time in the high temperature zone is 6h, and the flow rate is 6m 3 / The nitrogen gas of h flows through the high temperature z...

Embodiment 2

[0039] a. Add α-Al 2 o 3 The particles and natural carbon black are put into a dry ball mill for ball milling for 5 hours according to a mass ratio of 1.5:1 to obtain a mixed powder;

[0040] b. Mix and granulate the mixed powder, phenolic resin and deionized water according to the mass ratio of 10:0.5:8, put the granulated granules into a drying oven for debinding, and prepare a precursor with an average particle size of 2-10mm body particles;

[0041] c. Send the precursor particles into a vertical graphite continuous synthesis furnace for continuous reaction in a nitrogen atmosphere to produce carbon-containing aluminum nitride particles, wherein the reaction temperature in the furnace is 1800°C, and the pressure in the furnace is 2000Pa; The bulk particles naturally fall through the high temperature zone in the furnace from top to bottom, the residence time in the high temperature zone is 15h, and the flow rate is 18m 3 / h nitrogen gas flows through the high temperature z...

Embodiment 3

[0044] a. Add α-Al 2 o 3 The particles and acetylene carbon black were put into a dry ball mill for ball milling for 8 hours according to a mass ratio of 2.5:1 to obtain a mixed powder;

[0045] b. Mix the mixed powder, epoxy resin and absolute ethanol according to the mass ratio of 10:2:4 and then granulate. Put the granulated particles into the drying oven for debinding to prepare the average particle size 2-10mm precursor particles;

[0046] c. Send the precursor particles into a vertical graphite continuous synthesis furnace for continuous reaction in a nitrogen atmosphere to produce carbon-containing aluminum nitride particles, wherein the reaction temperature in the furnace is 1700°C, and the pressure in the furnace is 2000Pa; The bulk particles naturally fall through the high temperature zone in the furnace from top to bottom, the residence time in the high temperature zone is 10h, and the flow rate is 10m 3 / The nitrogen gas of h flows through the high temperature z...

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Abstract

The invention discloses a preparation method of aluminum nitride powder. The preparation method comprises the following steps: carrying out uniform mechanical mixing on an aluminum source with a carbon source; enabling precursor granules to continuously react in a nitrogen environment to obtain carbon-containing aluminum nitride granules, and carrying out calcining decarbonization so as to obtainaluminum nitride granules; crushing the aluminum nitride granules, thereby obtaining aluminum nitride powder. The precursor granules continuously react, a sufficient nitrogen channel is reserved in the material piling process in a synthesis process, a nitrogen atmosphere is in sufficient contact with the granules, inverted nitrogen flows form a compulsive gas path to carry away generated CO rapidly, materials are in sufficient contact with the nitrogen atmosphere constantly, the reaction time is greatly shortened, sufficient reactions can be ensured, and the purity of the finally prepared aluminum nitride powder is improved. The invention further discloses the aluminum nitride powder prepared with the method and application of the aluminum nitride.

Description

technical field [0001] The invention belongs to the field of inorganic non-metallic materials, and in particular relates to an aluminum nitride powder and its preparation method and application. Background technique [0002] As a new type of material, aluminum nitride ceramics have excellent thermal conductivity, low dielectric loss and dielectric constant, and reliable electrical insulation properties. At the same time, they have a series of excellent properties such as a thermal expansion coefficient close to Si. It is considered It is an ideal material for highly integrated semiconductor substrates and electronic device packaging, and has broad application prospects in the fields of national defense, aerospace, communications, and microelectronics. [0003] For aluminum nitride ceramic materials, the technical indicators of the original aluminum nitride powder, such as particle size, purity, and particle morphology, directly affect the comprehensive performance of aluminu...

Claims

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Application Information

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IPC IPC(8): C04B35/581C04B35/626
CPCC04B35/581C04B35/62605
Inventor 孙登琼田晨光张浩崔嵩郭军党军杰
Owner NO 43 INST OF CHINA ELECTRONICS TECH GRP CETC
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