Sensor device

Abstract

The invention relates to a load-enhancing micromechanical sensor device in the detection fields of mass, weight, pressure, touch force, pulse, blood pressure, object resistance displacement, magnetostrictive displacement and the like and in the control fields of precision control, keys, switches and the like. The sensor device comprises a pressure sensor component and a force transmission component, wherein an external input force is decomposed or transferred to a base body or a shell and the force transmission component by an elastic component, so that an elastic diaphragm portion thereof only receives part of the input force. The technical solution has the advantages that a pressure sensor chip or a thin-film pressure sensor with low loading pressure and low range can also be used to manufacture a high-performance, high-loading pressure or high range sensor device.

Description

Technical field [0001] The invention relates to a sensor device, especially suitable for detection fields such as quality, weight, pressure, touch force, pulse, blood pressure, object resistance displacement, magnetostrictive displacement, etc., and load enhancement in control fields such as precision control, buttons, and switches. A micromechanical sensor device belongs to the technical field of sensors, but is not limited thereto. Background technique [0002] China Invention Patent Application No. 2018108593234, title: "a sensor device", discloses a sensor device similar to the present invention, the sensor device uses a pressure sensor component composed of a pressure sensor chip, because the pressure sensor chip The thickness of the middle elastic diaphragm is relatively thin, so the manufactured sensor device has higher sensitivity and precision; however, due to the thinner thickness of the elastic diaphragm in the pressure sensor chip, the bearing pressure of the man...

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Problems solved by technology

[0002] China Invention Patent Application No. 2018108593234, title: "a sensor device", discloses a sensor device similar to the present invention, the sensor device uses a pressure sensor component composed of a pressure sensor chip, because the pressure sensor chip The thickness of the middle elastic diaphragm is relatively thin, so the manufactured sensor device has higher sensitivity and precision; however, due to the thinner thickness of the elastic diaphragm in the pressure sensor chip, the bearing pressure of the manufactured sensor device or The range is small; in order to increase the bearing pressure or range of the sensor device, it is usually necessary to increase the thickness of the elastic diaphragm in the sensor chip. However, increasing the thickness of the elastic diaphragm in the sensor chip requires higher production costs and takes a long time , for this reason, the existing similar sensor devices have the defects of small bearing pressure or small range

[0003] In addition, there is an oil-filled contact force sensor, the structure of which is to arrange the pressure sensor chip in an oil-filled container, and realize the pressure or contact force by resisting the corrugated diaphragm, changing the volume of the container and the pressure of the oil on the pressure sensor chip. The main defect is that the detection accuracy is easily affected by the change of ambient temperature

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