Magnetostrictive metal substrate-based magnetic sonar sensor and preparation method thereof

Abstract

The invention discloses a magnetostrictive metal substrate-based magnetic sonar sensor, and belongs to the technical field of magnetic acoustic detection. The magnetostrictive metal substrate-based magnetic sonar sensor comprises a magnetic field detection part composed of two magnetic acoustic surface wave resonator units and an acoustic pressure detection part composed of 2xN arrayed piezoelectric ultrasonic transducer units; the magnetic acoustic surface wave resonator units and the piezoelectric ultrasonic transducer units share magnetostrictive substrates, metal buffer layers, piezoelectric thin films and protective layers; and the thicknesses of the piezoelectric thin films in the two magnetic acoustic surface wave resonator units are different. The magnetostrictive metal substrate-based magnetic sonar sensor integrates magnetic acoustic surface wave resonators and piezoelectric ultrasonic transducers to realize magnetic field detection and acoustic pressure detection of an underground target such as a ship, a submarine and a UUV (Unmanned Underwater Vehicle), and has the advantages of simple structure, easiness in machining, low cost, high integration degree, high detectionsensitivity, low loss, high response speed and the like.

Description

technical field [0001] The invention belongs to the technical field of magnetoacoustic detection, and in particular relates to a magnetic sonar sensor based on a magnetostrictive metal substrate and a preparation method thereof. The sensor has the functions of magnetic anomaly field and sound pressure detection, and can be used for underwater target detection, Positioning, navigation or other underwater acoustic detection systems. Background technique [0002] In the field of underwater acoustic detection technology, the underwater acoustic sensor is generally composed of a sound pressure underwater acoustic sensor and a sensor that directly or indirectly measures the vibration velocity, and can simultaneously measure the underwater acoustic scalar and vector (sound pressure gradient, particle velocity , acceleration, displacement or sound intensity, etc.) information. The sensing element of the miniature acoustic directional transducer, that is, the piezoelectric ultrasoni...

AI Technical Summary

Problems solved by technology

These magneto-acoustic sensor devices are formed by mechanical combination, with large volume, complex structure and manufacturing process. At the same time, the mechanical structure couples the underwater acoustic sensor and the magnetic field sensor, which makes it difficult to ensure the consistency of the magnetic sonar sensor, and it is also difficult to adapt to current devices. The need for miniaturization

Therefore, in terms of underwater target detection requirements, there is still a lack of a highly integrated, consistent, high detection sensitivity, and accurate positioning sensor that can detect sound pressure and magnetic field composite signals.

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