Device and method suitable for measuring dielectric parameter of high reflection material in terahertz frequency band
A technology for dielectric parameters and measurement methods, applied in the terahertz field, can solve the problems of inaccurate reflectivity amplitude, phase measurement, and inability to accurately invert material dielectric parameters, and achieve the effect of improving measurement accuracy
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Embodiment 1
[0057] An embodiment of the present invention provides a device suitable for measuring dielectric parameters of highly reflective materials in the terahertz frequency band, including: a reference plate, a transmission measurement module, a reflection measurement module, and a calculation module. Among them, the transmission measurement module is used to measure the terahertz wave transmission of the reference plate; the reflection measurement module is used to respectively obtain the terahertz wave energy reflected by the reference plate and the material plate to be tested under the same set incident angle; The measurement results of the transmission measurement module obtain the refractive index and extinction coefficient of the reference plate and calculate the reflectance reflected by the reference plate at a set incident angle, and combine the terahertz wave energy reflected by the reference plate and the material plate to be tested to calculate the The reflectivity and pha...
Embodiment 2
[0074] Such as figure 2 As shown, the second embodiment provides a method for measuring the dielectric parameters of highly reflective materials in the terahertz frequency band, which can be carried out by using the dielectric parameter measurement device for high-reflection materials in the terahertz frequency band described in any of the above-mentioned embodiments. measurement, including the following steps:
[0075] S1. Perform terahertz wave transmission measurement on the reference plate, obtain the refractive index and extinction coefficient of the reference plate, and calculate the reflectance reflected by the reference plate at a set incident angle;
[0076] S2, respectively measuring the terahertz wave energy reflected by the reference plate and the material plate to be tested under the same set incident angle;
[0077] S3. Calculate the reflectivity of the material plate to be measured in the measurement frequency band according to the reflectance of the reference...
Embodiment 3
[0118] The third embodiment is basically the same as the second embodiment, and the similarities will not be repeated. The difference lies in:
[0119] In this embodiment, the reflectivity of metal aluminum is measured with a silicon chip reference plate, such as image 3 As shown, the measurement frequency range (frequency band II) is 0.2-3THz, and the phase shift integration is divided into three segments: frequency band I: 0-0.2THz, frequency band II: 0.2-3THz, frequency band II: above 3THz, and according to the K-K relationship The dielectric parameters are calculated as Figures 4a to 4d as shown, Figure 4a is the refractive index curve of metal aluminum; Figure 4b is the metal aluminum extinction coefficient curve; Figure 4c is the real part curve of the dielectric parameter of metal aluminum; Figure 4d is the imaginary part curve of the dielectric parameter of metal aluminum.
[0120] According to the article Optical properties of Al, Fe, Ti, Ta, W, and Mo at s...
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