Nanopore sandwich structure for DNA base sequence detection and preparation method thereof

Abstract

The invention provides a nanopore sandwich structure for DNA base sequence detection and a preparation thereof. The preparation method includes the steps: deposting Si3N4 / SiO2 / Si3N4 three-layer nano-films on both sides of a substrate; forming a substrate release window by etching one thin film at one side of the substrate; then etching the top layer Si3N4 in the film on the other side of the substrate; then obtaining the self-supporting nano-film composed of two layers of Si3N4 / SiO2 nano-film by etching the substrate from the substrate release window with alkaline solution; then depositing Si_3N_4 over SiO_2 to obtain suspended nano-film structure, which is annealed and etched with helium ion beam to form nano-via; and obtaining a sandwich structure consisting of a SiO2 cavity and two Si3N4 nanopores by etching SiO2 with buffered hydrofluoric acid. The invention has the advantages of simple process, good expansibility due to compatibility with the CMOS process, and can be used repeatedly and has a wide application prospect.

Description

technical field [0001] The invention belongs to the technical field of preparation and application of micro-nano devices, and relates to a manufacturing method of a nanopore biomolecular detection device, in particular to a nanopore sandwich structure for DNA base sequence detection and a manufacturing method thereof. Background technique [0002] The nanopore-based DNA sequencing method was proposed by John Kasianowicz on the basis of Coultre's patent in 1996. Its working principle is that when DNA passes through the nanopore, the resistance of the nanochannel will be changed due to the physical occupation of the DNA. It will lead to the change of the ion current, forming a modulation current similar to a square wave signal, and the waveform of the modulation current is directly related to the physical information of biomolecules. By analyzing the amplitude and dwell time of the square wave signal, the four bases (A, C, G, T) of DNA are identified, so as to achieve the purp...

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Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a nanopore sandwich structure for DNA base sequence detection and its manufacturing method, which is used to solve the disadvantages that the prior art is not feasible, and simultaneously realize the existing technology and Compatible with CMOS technology, can effectively reduce the complexity of the manufacturing process and other issues

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