Concentration management device for chemical solution, regeneration unit, and charge calculation method and system
A technology of management device and calculation method, applied in the direction of manufacturing calculation system, calculation, measurement device, etc., can solve problems such as difficulty in earning profits
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[0037] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings as appropriate. However, unless otherwise specified, the shapes, sizes, dimensional ratios, relative arrangements, and the like of devices described in these embodiments are not limited to the examples shown in the scope of the present invention. These examples are only schematically illustrated as explanatory examples.
[0038] In addition, in the following description, as a specific example of a chemical solution used in the manufacturing process of a semiconductor or a liquid crystal display, 2.38 wt % (hereinafter, wt % is simply described as %) of a tetramethylammonium hydroxide aqueous solution (hereinafter, tetramethylammonium hydroxide is referred to as TMAH) will be described.
[0039] Wherein, the medicinal solution used in the present invention is not limited thereto. Examples of other chemical solutions to which the present invention can b...
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