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A manufacturing method, sensor and working method of an in-situ growth alumina carrier temperature and humidity integrated sensor

A technology that integrates sensors and alumina carriers, applied in the field of sensors, can solve the problems of inability to reuse component functions, poor sensor reliability, and many materials for sensors, and achieve the effect of improving long-term stability, high sensitivity, and large specific surface area.

Active Publication Date: 2020-05-15
HARBIN ENG UNIV +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The temperature and humidity integrated sensors described in the above patent application have in common that a humidity unit and a temperature unit are separately fabricated on the same substrate. The humidity unit has the characteristics of making sensitive humidity materials on the substrate. There are many materials used for sensors, the functions of components cannot be reused, and the disadvantages of poor reliability of sensors

Method used

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  • A manufacturing method, sensor and working method of an in-situ growth alumina carrier temperature and humidity integrated sensor
  • A manufacturing method, sensor and working method of an in-situ growth alumina carrier temperature and humidity integrated sensor
  • A manufacturing method, sensor and working method of an in-situ growth alumina carrier temperature and humidity integrated sensor

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Experimental program
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Embodiment 1

[0039] Example 1: A method for manufacturing an in-situ growth alumina carrier temperature and humidity integrated sensor, the specific steps are:

[0040] Step 1. Utilizing in-situ grown Al 2 o 3 Porous film-shaped ceramic material is used as the sensitive body of the humidity unit, and at the same time as the substrate of the temperature unit, which is processed into an integrated sensor microstructure carrier through micro-processing technology, and at the same time forms electrode via holes;

[0041] Step 2. Use the screen printing process to make temperature unit sensitive electrodes on one side of the integrated sensor microstructure carrier. The temperature unit sensitive electrodes are also used as humidity unit purifiers and sintered at high temperature;

[0042] Step 3: Use the screen printing process to make interdigitated electrodes of the humidity unit on the other side of the integrated sensor microstructure carrier, and sinter at high temperature to form a sens...

Embodiment 2

[0051] Example 2: An in-situ growth alumina carrier temperature and humidity integrated sensor described in Example 2 of the present invention is obtained based on the manufacturing method of an in-situ growth alumina carrier temperature and humidity integrated sensor described in Example 1 Yes, the sensor includes a sensitive chip, a 4-pin base 9 and a tube shell; the sensitive chip includes an in-situ grown Al 2 o 3 The integrated sensor microstructure carrier of porous membrane ceramic material, the integrated sensor microstructure carrier 2 is used as the humidity unit sensitive body, and also serves as the temperature unit substrate, the integrated sensor microstructure carrier 2 is processed with electrode via holes, and the integrated sensor microstructure carrier 2 is one side Make the sensitive electrode 1 of the temperature unit, the sensitive electrode of the temperature unit is used as the purifier of the humidity unit at the same time, and make the interdigitated ...

Embodiment 3

[0052] Embodiment 3: Embodiment 3 of the present invention is based on the use method of an in-situ growth alumina carrier temperature and humidity integrated sensor described in Embodiment 2, specifically: first detect the resistance value of the sensitive electrode of the temperature unit, and then detect the temperature The temperature of the environment where the humidity integrated sensor is located; then load the current to the sensitive electrode of the temperature unit, so that the temperature of the alumina carrier of the temperature and humidity integrated sensor reaches 350 ° C ~ 550 ° C, thermally purify the alumina carrier; detect when the carrier cools to the ambient temperature The humidity unit refers to the resistance between the electrodes, and the ambient humidity is converted to realize humidity measurement.

[0053] The present invention is different and different from the patent application recorded in the background technology in terms of preparation meth...

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Abstract

The invention discloses a method for manufacturing an in-situ growth alumina carrier temperature and humidity integrated sensor, the sensor and a working method, and belongs to the technical field ofsensors. The method is characterized by comprising a step of taking an in-situ grown porous Al2O3 ceramic as a humidity unit sensitive body and taking the humidity unit sensitive body as a temperatureunit substrate at the same time, a step of preparing a temperature sensitive resistor by a thick film screen printing process, wherein the temperature sensitive resistor is taken as a heat purifier of a humidity unit at the same time, and lead-out wires of temperature unit and humidity unit electrodes are made by a gold paste burning process, a step of immersing the porous Al2O3 ceramic with a surface modifier, and a step of welding an integrated chip on the 4-foot base by an energy storage spot welding process and packaging the chip with a waterproof and breathable membrane. The core of thesensor has a nanotube array structure feature, and the temperature and humidity in an environment can be detected under an atmospheric condition. The integration of a sensor temperature and humidity detection unit is realized, the multiplexing of each functional component is improved, and the number of functional components is minimized to the largest extent.

Description

technical field [0001] The invention relates to a sensor, a working method and a preparation method thereof, in particular to a manufacturing method of an in-situ growth alumina carrier temperature and humidity integrated sensor, a sensor and a working method, and belongs to the technical field of sensors. Background technique [0002] Life and production are inseparable from the measurement and control of temperature and humidity. Defective products in agricultural production and industrial manufacturing have a certain correlation with the humidity of the environment. Especially for the electronics industry, the hazard of moisture has become one of the main factors affecting the quality of electronic products, such as integrated circuits, liquid crystal devices, silicon wafers, electronic devices, etc., if they are stored for too long in a high-humidity environment, the pads and chip leads Oxidation on the surface of the feet leads to poor contact and failure, and environme...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/16G01N27/04
CPCG01K7/16G01N27/048
Inventor 张凯张洪泉安文斗
Owner HARBIN ENG UNIV
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