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Method for preparing VO2 composite film with optical limiting performance

A composite thin film and optical limiting technology, which is applied in the coating of superimposed layers, the device for coating liquid on the surface, ion implantation plating, etc., can solve the problems of increasing the difficulty of material compounding and the lack of reports on optical limiting films. , to achieve convenient large-area preparation and mass production, improve laser protection performance, and the effect of simple and controllable preparation process

Active Publication Date: 2018-12-07
AVIC BEIJING INST OF AERONAUTICAL MATERIALS
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

However, regarding VO compounded with noble metal nanoparticles 2 Optical limiting films have not been reported
Its main technical bottleneck is that on the one hand, the effective implementation of surface plasmon resonance technology requires good uniformity in the particle size of nanomaterials such as Au and Ag; The size of the nanostructure can be adjusted, which further increases the difficulty of compounding the material

Method used

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  • Method for preparing VO2 composite film with optical limiting performance
  • Method for preparing VO2 composite film with optical limiting performance
  • Method for preparing VO2 composite film with optical limiting performance

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] 1) Using the metal vanadium target as the sputtering source, a 200nm thick metal V film was sputtered on a clean quartz substrate under argon gas conditions, the substrate temperature was kept at 200°C, the sputtering time was 60min, and the sputtering power was 150W ;

[0026] 2) Place the substrate sputtered with the V film in a tube furnace, and anneal it with a nitrogen-oxygen mixture, in which the ratio of nitrogen to oxygen is 10:1, the annealing temperature is 480°C, the annealing time is 60min, and cooled to Take out after room temperature;

[0027] 3) Mix 50ml of absolute ethanol, 7ml of deionized water, and 7ml of concentrated ammonia water, and stir evenly to obtain a reaction solution; in a constant temperature water bath at 40°C, slowly add 5ml of tetraethyl orthosilicate to the above solution, and stir for 30 minutes. Reaction 24h. After the reaction is completed, centrifuge repeatedly with absolute ethanol, wash, and then disperse by ultrasonic to obtai...

Embodiment 2

[0033] 1) Using the metal vanadium target as the sputtering source, a 200nm thick metal V film was sputtered on a clean quartz substrate under argon gas conditions, the substrate temperature was kept at 200°C, the sputtering time was 60min, and the sputtering power was 150W ;

[0034] 2) Place the substrate sputtered with the V film in a tube furnace, and anneal it with a nitrogen-oxygen mixture, in which the ratio of nitrogen to oxygen is 10:1, the annealing temperature is 480°C, the annealing time is 60min, and cooled to Take out after room temperature;

[0035] 3) Mix 50ml of absolute ethanol, 7ml of deionized water, and 7ml of concentrated ammonia water, and stir evenly to obtain a reaction solution; in a constant temperature water bath at 40°C, slowly add 20ml of tetraethyl orthosilicate to the above solution, and stir for 30 minutes. Reaction 24h. After the reaction is completed, centrifuge repeatedly with absolute ethanol, wash, and then disperse by ultrasonic to obta...

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Abstract

The invention belongs to the technical field of functional films, and particularly relates to a method for preparing a VO2 composite film applying to the laser protection technology. A uniform-particle-size size-adjustable Au / SiO2 or Ag / SiO2 nanostructure layer is prepared on the surface of the VO2 film based on a surface plasmon resonance technique, and therefore the laser protection performanceof the film is effectively improved. Compared with a conventional pure VO2 laser protection film, the VO2 composite film is lower in laser transmittance and higher in laser damage threshold. The process can effectively improve the responsiveness of the film to lasers and the laser radiation resistance of the film. The preparation process of the film is simple and controllable, and expensive equipment is not required. Meanwhile, special requirements for the size and shape of the VO2 film are not available. A novel technology with high efficiency, short cycle and industrial implementation is provided for the VO2-based laser protection film.

Description

technical field [0001] The invention belongs to the technical field of functional thin films, and in particular relates to a VO film applied to laser protection technology. 2 Preparation method of composite film. Background technique [0002] With the rapid development of laser interference and blinding weapons, it has become an important problem to be solved urgently to find a new type of material suitable for laser protection to protect military personnel and various photoelectric detection systems from attack. In 1959, Morin discovered for the first time that the oxides of vanadium and titanium have semiconductor-metal phase transition characteristics, that is, in the semiconductor state, the material has high transmission characteristics; in the metal state, the material has high reflection characteristics. This characteristic makes it potential for smart optical limit switches. Compared with other laser protection materials, VO 2 With the advantages of wide protectio...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/18C23C14/58B05D7/24B05D3/04
CPCB05D3/0413B05D7/24B05D2203/30C23C14/185C23C14/34C23C14/5806C23C14/5853C23C28/30
Inventor 田野曹雪罗飞刘大博
Owner AVIC BEIJING INST OF AERONAUTICAL MATERIALS
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