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A kind of tft array substrate of flexible liquid crystal panel and manufacturing method thereof

A technology of array substrates and flexible liquid crystals, applied in nonlinear optics, instruments, semiconductor devices, etc., can solve problems such as exceeding the glass transition temperature of plastic substrates, and achieve the effect of overcoming production difficulties and simplifying production steps

Active Publication Date: 2020-09-18
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Application Information

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Problems solved by technology

At present, the main material used for this alignment layer is polyimide, which has the characteristics of high reliability and excellent dielectric properties, but the disadvantage of this type of material is that it generally requires a high temperature of about 200°C to cure during the preparation process. , which exceeds the glass transition temperature of most plastic substrates

Method used

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  • A kind of tft array substrate of flexible liquid crystal panel and manufacturing method thereof
  • A kind of tft array substrate of flexible liquid crystal panel and manufacturing method thereof
  • A kind of tft array substrate of flexible liquid crystal panel and manufacturing method thereof

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Embodiment Construction

[0038] The problem to be solved by the present invention is to provide a TFT array substrate with an alignment function without a low-temperature alignment layer for a flexible liquid crystal panel and a manufacturing method thereof. The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0039] like figure 1 and image 3 As shown, a method for manufacturing a TFT array substrate of a flexible liquid crystal panel in this embodiment includes:

[0040] S01, prepare an amorphous silicon layer on the surface of the substrate; since the substrate is a rigid substrate, usually glass material can be used, in order to facilitate the separation of the TFT array and the substrate, it is necessary to first laying a layer of amorphous silicon, the amorphous silicon is amorphous silicon, and the lattice network between its atoms is arranged in disorder;

[0041] S02, preparing a TFT array on the surface of the amorphous ...

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Abstract

A preparation method for a TFT array substrate of a flexible liquid crystal panel, comprising: preparing an amorphous silicon layer (20) on the surface of a substrate (10) (100); preparing a TFT array (30) on the surface of the amorphous silicon layer (20) (200); cleaning the surface of the TFT array (30) (300); preparing a polydimethylsiloxane substrate (40) on the TFT array (30) (400); using lasers to irradiate, so that the amorphous silicon layer (20) is separated (500); providing a flexible substrate (60), and adhering the TFT array (30) to the flexible substrate (60) (600); and peeling off the polydimethylsiloxane substrate (40) (700).

Description

technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to a method for manufacturing a TFT array substrate of a flexible liquid crystal panel. Background technique [0002] The display device of flexible LCD (Liquid Crystal Display, liquid crystal panel) has broad application prospects, but flexible LCD faces many challenges in the manufacturing process. One of the problems faced in manufacturing a flexible LCD is that the components of the flexible LCD need to be fabricated on a flexible substrate, but most of the existing flexible substrate materials cannot withstand the high temperature in the manufacturing process. Combined with the prior art, three methods are commonly used to solve this problem: one method is to replace inorganic materials with organic materials to make TFT (Thin Film Transistor, thin film transistor) array substrates, and at the same time, the evaporation process that requires high temperature is u...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1362G02F1/1337H01L27/12
CPCG02F1/133711G02F1/136277H01L27/1214
Inventor 石钰陈兴武
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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