Ozone gas-sensitive material, preparation method thereof, ozone gas-sensitive device, preparation method of ozone gas-sensitive device

A technology of ozone gas and devices, which is applied in the field of semiconductor gas sensor components, can solve the problems of low working temperature and high response sensitivity

Active Publication Date: 2018-10-02
WUHAN INSTITUTE OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there is no mature ozone gas-sensitive material in China, so preparing an ozone gas-sensitive material with high response sensitivity, low working temperature, ultra-low detection limit and good long-term stability and its gas sensor will have great market prospects

Method used

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  • Ozone gas-sensitive material, preparation method thereof, ozone gas-sensitive device, preparation method of ozone gas-sensitive device

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Preparation of ozone gas sensor

[0032] (1) Weigh 35.06g (0.1mol) SnCl 4 ·5H 2 O was dissolved in 1L of water, and 21.0g (0.1mol) of C 8 h 8 o 7 ·H 2 O was dissolved in 1L of water, and the two solutions were mixed uniformly to obtain solution I;

[0033] (2) 23.80g (0.2mol) CoCl 2 ·6H 2 O was dissolved in 1L of water to obtain solution II;

[0034] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 1L of 0.6mol / L NaOH solution and stir for 15-30min, add 1L of 3mol / L NaOH solution and stir for 15min to obtain a mixed solution, and then The obtained mixed solution was transferred into a reaction kettle for solvothermal reaction at 180° C. for 12 hours, then the reaction kettle was naturally cooled to room temperature, and the reaction product was suction filtered, washed and dried to obtain the precursor cobalt hydroxide nanopowder.

[0035] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up...

Embodiment 2

[0039] Preparation of ozone gas sensor

[0040] (1) Weigh 1.052g (3mmol) SnCl 4 ·5H 2 O was dissolved in 10mL water, 0.63g (3mmol) C 8 h 8 o 7 ·H 2 O was dissolved in 10mL of water, and the two solutions were mixed uniformly to obtain solution I;

[0041] (2) 0.7138g (3mmol) CoCl 2 ·6H 2 O was dissolved in 10 mL of water to obtain solution II;

[0042] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 10mL of 3mol / L NaOH solution and stir for 15-30min, add 20mL of 7.5mol / L NaOH solution and stir for 15min to obtain a mixed solution, and then the obtained The mixed solution was transferred into a reactor for solvothermal reaction, and reacted at 200° C. for 8 hours, then the reactor was naturally cooled to room temperature, and the reaction product was suction filtered, washed, and dried to obtain the precursor cobalt hydroxide nanopowder.

[0043] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up...

Embodiment 3

[0047] Preparation of ozone gas sensor

[0048] (1) Weigh 2.805g (8mmol) SnCl 4 ·5H 2 O was dissolved in 20mL water, 1.680g (8mmol) C 8 h 8 o 7 ·H 2 O was dissolved in 20mL of water, and the two solutions were mixed uniformly to obtain solution Ⅰ;

[0049] (2) 1.903g (8mmol) CoCl 2 ·6H 2 O was dissolved in 20mL of water to obtain solution II;

[0050] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 20mL of 3.6mol / L NaOH solution and stir for 15-30min, add 40mL of 7.2mol / L NaOH solution and stir for 15min to obtain a mixed solution, then The obtained mixed solution was transferred into a reactor for solvothermal reaction, and reacted at 120° C. for 8 hours, then the reactor was naturally cooled to room temperature, and the reaction product was suction filtered, washed, and dried to obtain the precursor cobalt hydroxide nanopowder.

[0051] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up at 300...

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Abstract

The invention relates to an ozone gas-sensitive material, a preparation method thereof, an ozone gas-sensitive device and a preparation method of the ozone gas-sensitive device. The ozone gas-sensitive material is Co3O4 nano-powder, and has hollow cubic structure and particle size of the material is 100-250 nm. The preparation method of the gas-sensitive material comprises the following steps: mixing an aqueous solution of tin chloride and an aqueous solution of citric acid to obtain a solution I; mixing an aqueous cobalt chloride solution with the solution I, adding NaOH or KOH, performing stirring, adding NaOH or KOH again, performing stirring to obtain a mixed solution, wherein the molar ratio of NaOH or KOH added for the first and second time to tin chloride is 6-10:1 and 30-50:1 respectively; conducting hydrothermal reaction on the mixed solution, filtering, washing and drying a reaction product to obtain a precursor, and heating and calcining the precursor to obtain the Co3O4 nano-powder. The gas-sensitive material has high sensitivity and good selectivity to ozone, and the prepared gas-sensitive device has a detection function that is highly sensitive to ozone gas.

Description

technical field [0001] The invention relates to the technical field of semiconductor gas sensitive elements, in particular to an ozone gas sensitive material and its preparation, an ozone gas sensitive device and its preparation method. Background technique [0002] Ozone is an oxidizing agent. Low concentrations of ozone can purify and sterilize the air. However, when the indoor ozone concentration is higher than 0.1mg / m 3 Sometimes it will cause air pollution and cause certain harm to human health. Usually, symptoms such as skin itching, shortness of breath, cough and rhinitis will occur, and it will also stimulate the central nervous system and eyes. In severe cases, it will also cause asthma and emphysema. Etc, so detection of ozone concentration is crucial. [0003] At present, the detection methods of ozone mainly include: iodometric method, ultraviolet-visible absorptiometry, chemiluminescence method, electron spin resonance method, high performance liquid chromatogr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01G51/04G01N27/00
CPCC01G51/04C01P2004/04C01P2004/38C01P2004/62G01N27/00
Inventor 林志东李婷付萍陈喆
Owner WUHAN INSTITUTE OF TECHNOLOGY
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