A mask transfer pre-alignment device and method

A pre-alignment and mask technology, applied in the field of mask transmission, can solve the problem of low pre-alignment accuracy and so on

Active Publication Date: 2020-04-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] The present invention provides a mask transmission pre-alignment device and method to solve the problem of low pre-alignment accuracy existing in the prior art

Method used

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  • A mask transfer pre-alignment device and method
  • A mask transfer pre-alignment device and method
  • A mask transfer pre-alignment device and method

Examples

Experimental program
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Effect test

Embodiment 1

[0057] Such as Figure 4 and Figure 5 As shown, the present invention provides a mask transmission pre-alignment device, which sequentially includes a light source module 100, a pre-alignment test component 200 and an imaging module 300;

[0058] The light source module 100 sequentially includes a light source 1, a collimation unit 2, and a reticle 3 with a cross mark 31; the light source 1, the collimation unit 2, and the reticle 3 with a cross mark 31 are coaxially arranged, and the positions of the three are opposite to each other. fixed, and installed on the reference plate of the pre-alignment device, the preferred light source 1 is an LED light source that emits LED light, and the collimation unit 2 is an illumination lens that collimates the LED light emitted by the light source 1, with a cross mark The reticle 3 is used to provide components for self-adjusting compensation patterns, and the cross mark 31 therein is opaque. The pre-alignment test part 200 is a reticle ...

Embodiment 2

[0075] Such as Figure 8 As shown, different from Embodiment 1, a second turning prism 8 is also provided between the semi-transparent and semi-reflecting prism 5 and the four-quadrant detector 7 in the present embodiment. At this time, the light source 1, the illumination lens, The reticle 3 with the cross mark 31, the pre-alignment test component 200, the first turning prism 4, the semi-transparent and half-reflecting prism 5, the CCD detector 6, the four-quadrant detector 7 and the second turning prism 8 form a second double far In the imaging system, the light emitted by the light source 1 sequentially passes through the illumination lens, the reticle 3 with the cross mark 31, the pre-alignment test part 200, the first turning prism 4, the semi-transparent and half-reflecting prism 5 and the second turning prism 8, and then enters the The four-quadrant detector 7 performs imaging.

[0076] In summary, the mask transmission pre-alignment device provided by the present inve...

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Abstract

The invention discloses a pre-alignment device and method for reticle transmission. The pre-alignment device reticle transmission successively comprises a light source module, a pre-alignment test part and an imaging module. The light source module successively comprises a light source, an alignment unit and a reticle with a cross mark. The imaging module comprises a first deflecting prism, a transflective prism, a CCD detector and a four-quadrant detector. Light emitted by the light source enters the imaging module and then successively passes through the first deflecting prism and the transflective prism; and then a part of the light enters the CCD detector, and the other part of the light enters the four-quadrant detector. In the process of alignment, the cross mark on the reticle withthe cross mark is imaged in the CCD detector at first; position deviation between the light source module and the imaging module is detected; linear calibration compensation is carried out on the measured value of the four-quadrant detector later based on the position deviation; and thus, the pre-alignment device realizes the functions of self-detection and calibration, solves the problem of low alignment accuracy of the light source module and the imaging module and ensures pre-alignment precision.

Description

technical field [0001] The invention relates to the field of mask transmission, in particular to a mask transmission pre-alignment device and method. Background technique [0002] In the mask transmission subsystem of the lithography machine, the pre-alignment technology is used to determine the position of the mask plate before picking and placing the plate, so as to eliminate the position deviation of the mask plate during the transmission process and ensure that the mask plate is handed over to the plate before the plate exchange robot. Version accuracy. Ensure the repeatability of the position from the mask loading plate to the mask table, so that when the mask is sent to the exposure area, the alignment mark is within the coaxial alignment capture range. Such as figure 1 As shown, the rough pre-alignment light source and quadcell sensor in this architecture are installed inside the mask transmission subsystem, where the quad-quadrant detector 11' used for coarse pre-a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F9/00
CPCG03F9/7046G03F9/7088G03F9/7096
Inventor 顾俊程习敏王海江于大维袁明波
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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