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An in-situ oxygen supplement type scanning electron beam vapor deposition (ioc-sevd) device and method thereof

A vapor deposition and scanning technology, which is applied in ion implantation plating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of large fluctuations in condition parameters, difficult control of coating quality, and difficult temperature control. Achieve long service life, low preparation and maintenance costs, stable and reliable quality

Active Publication Date: 2020-05-19
XIANGTAN UNIV
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Problems solved by technology

In addition, traditional thermal barrier coating EB-PVD equipment uses direct electron guns for substrate heating, which makes temperature control difficult, condition parameters fluctuate greatly, and coating quality is difficult to control

Method used

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  • An in-situ oxygen supplement type scanning electron beam vapor deposition (ioc-sevd) device and method thereof
  • An in-situ oxygen supplement type scanning electron beam vapor deposition (ioc-sevd) device and method thereof
  • An in-situ oxygen supplement type scanning electron beam vapor deposition (ioc-sevd) device and method thereof

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Embodiment Construction

[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are exemplary only, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.

[0035] The present invention aims at the defects existing in the existing physical vapor deposition device when preparing metal oxides, especially columnar structure thermal barrier coatings, and proposes an in-situ oxygen supplement type scanning electron beam vapor deposition (IOC-SEVD) device. In the invention, the resistance radiation heating is used to replace the direct electron gun in the traditional electron beam ph...

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Abstract

The invention discloses an in-situ oxygen compensated-scanning electron vapor deposition (IOC-SEVD) device and a method thereof. The device comprises a vacuum system, an e-type electronic gun, a heater, a workpiece rotation holder and a control and display module, wherein the vacuum system comprises a vacuum pump and a vacuum cavity; the e-type electronic gun comprises an electronic gun emitting seat, an electronic gun deflection scanning magnetic field and a rotary water-cooling crucible; the heater comprises heater strips and a heating power supply connected through a circuit; the workpiecerotation holder comprises a rotation motor, a transmission shaft and a holder; and the control and display module comprises a device integrated state displayer and an electronic gun control panel. Themethod is that thermal barrier coating is prepared by utilizing the device. Through the device and the method, the thermal barrier coating with uniform columnar microstructures and high whole performance is prepared, so that the preparation requirements that the thermal barrier coating has high performance, high stability and high industrial productivity are met.

Description

technical field [0001] The invention relates to the field of electron beam physical vapor deposition, in particular to an In-situ Oxygen Compensated-Scanning Electron Vapor Deposition (IOC-SEVD) device and method thereof. Background technique [0002] Thermal barrier coating is a surface thermal protection technology that combines high temperature resistant, high heat insulation and corrosion resistant ceramic materials with metal substrates in the form of coating. The ability of parts to resist corrosion and oxidation. So far, thermal barrier coating technology has been listed as one of the three major protective technologies for aero-engine high-temperature thermal protection by the aviation development departments of various countries. Thermal barrier coatings generally consist of a ceramic layer for thermal insulation protection, a metal transition layer that enhances the adhesion between the ceramic and the substrate, and an oxide layer formed during preparation and se...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30
CPCC23C14/30
Inventor 杨丽周益春谢志航蔡书汉朱旺
Owner XIANGTAN UNIV
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