Suspension structural microwave filter and manufacturing method thereof
A microwave filter and suspension structure technology, applied in waveguide devices, microstructure technology, microstructure devices, etc., can solve the problems of large filter volume, high dielectric loss, and filter performance affected by the length of the bonding wire, etc., to achieve volume Small, low loss effect
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[0034] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0035] In the first aspect, an embodiment of the present invention provides a silicon-based double-layer microwave filter with through holes and a suspended structure, the basic structure of which is an interdigitated suspended stripline filter structure. The filter is formed by stacking two layers of dielectric materials up and down, and the...
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