Monolithic silicon-based transmitter

Abstract

The present invention discloses a monolithic silicon-based transmitter, and relates to the silicon photonic and photoelectron integration field. The emitter comprises a laser integrated to a silicon-based platform; a tip mode spot matcher formed on the end face of a silicon waveguide; a silicon waveguide biconical beam splitter used as the input end of an MZI modulator and connected with the tip mode spot matcher; two thermodes respectively formed on the two arms of the MZI modulator and / or two high-frequency electrodes respectively formed on the two arms of the MZI modulator; an MMI beam splitter formed behind the output end of the MZI modulator, wherein two output ports are split by the MMI beam splitter; and a backlight detector formed on the silicon-based platform and connected with one output port of the MMI beam splitter. The monolithic silicon-based transmitter not only realizes the monolithic integration of the laser and the modulator on the silicon-based platform, is low in manufacturing cost, simple in technology and high in integration degree, and facilitates the large-scale production.

Description

technical field [0001] The invention relates to the field of integration of silicon photons and optoelectronics, specifically a monolithic silicon-based emitter. Background technique [0002] With the development of information technology and CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) process technology, people require faster and faster computing speed of the system and smaller and smaller chip sizes. However, the chip size of silicon integrated circuits based on traditional etching processes has reached the technological limit; mainly because of the continuous reduction in size, the interconnection delay effect and energy consumption of traditional electrical interconnection-based integrated circuits have gradually emerged. , which limits the improvement of system speed and integration. Compared with the electrical interconnection technology, the optical interconnection technology using photonics as the information carrier has t...

AI Technical Summary

Problems solved by technology

However, the design structure of these converters is either complicated to manufacture, with small process tolerances, or requires the introduction of high-cost materials in the CMOS process

Both are incompatible with current silicon-dominated CMOS

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