A monolithic silicon-based emitter
A transmitter and silicon-based technology, applied in the direction of phonon exciters, lasers, laser components, etc., can solve the problems of small process tolerance, CMOS incompatibility, complex production, etc., and achieve large process tolerance and high integration , the effect of simple optical link
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[0030] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0031] see figure 1 As shown, the embodiment of the present invention provides a monolithic silicon-based transmitter, which includes: a laser 1 integrated into a silicon-based platform, which is used as an on-chip light source to input continuous laser light; a tip mode formed on the end face of a silicon waveguide A spot matcher 2 is used to match the mode spot of the laser 1; a silicon waveguide biconical beam splitter 3 as the input end of the MZI (Mach-Zehnder interference) modulator is used to split the input optical power (its length design The phase of the waveguide supermode caused by the alignment process error of the laser 1 can be changed, and the light is divided into two paths of equal power and output to the two arms of the MZI modulator); two thermal electrodes 4 and / or are respectively formed on the two arms of the MZ...
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