Heavy load pressure sensor and manufacturing method

A pressure sensor and pressure technology, applied in the direction of fluid pressure measurement by changing ohmic resistance, can solve the problem of silicon pressure sensor being difficult to be applied, and achieve the effect of reducing the risk of failure, improving the ability to resist shock and vibration, and simple production process

Active Publication Date: 2018-06-15
WUHAN FINEMEMS
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Due to the limitations of existing packaging technology and the characteristics of silicon materials, silicon pressure sensors are difficult to be used in harsh environments such as high pressure, high temperature and corrosion

Method used

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  • Heavy load pressure sensor and manufacturing method
  • Heavy load pressure sensor and manufacturing method
  • Heavy load pressure sensor and manufacturing method

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with the accompanying drawings. It should be noted that the following examples are based on the premise of this technical solution, and provide detailed implementation and specific operation process, but the protection scope of the present invention is not limited to the present invention. Example.

[0032] like Figure 1-2 As shown, a heavy-duty pressure sensor 100 includes a metal casing 130 , a support 140 , a piezoelectric conversion unit 160 , a pressure interface 180 and a signal processing circuit 150 .

[0033] like image 3 As shown, the piezoelectric conversion unit 160 is composed of a metal substrate 169 and a pressure sensing element 161 arranged on a plane on the metal substrate 169. and femtosecond laser curing to form a dense and firm combination with the metal substrate 169 . Further, a matching cylinder 164 is provided at the bottom of the piezoelectric conversion unit 160, which c...

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Abstract

The invention discloses a heavy load pressure sensor and a manufacturing method. A pressure sensor device comprises a piezoelectric conversion unit, a pressure interface, a signal processing circuit and a shell, wherein the piezoelectric conversion unit is manufactured through using an advanced composite technology based on a metal substrate; the piezoelectric conversion unit and the pressure interface are welded through an electron beam; the signal processing circuit is fixed through a full-degree-of-freedom self-restraint support seat; the shell is cooperated with the pressure interface andprovides support for a sealing component and a terminal button; and the signal processing circuit and the terminal button are interconnected. The structure of the sensor is simple, which is good for reducing production cost and a failure risk; and an all-metal packaging structure is suitable for the application of a heavy load poor working condition.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a heavy-duty pressure sensor and a manufacturing method thereof. Background technique [0002] Various sensors with environmental perception capabilities are the key to promoting intelligent manufacturing. Among them, various pressure sensors are widely used in vehicles, medical care, household appliances and other fields, especially silicon pressure sensors based on MEMS (micro-electromechanical systems) technology are widely used; taking typical vehicle applications as examples, such as TMPS, Tire pressure sensor, fuel tank pressure sensor. Due to the limitations of existing packaging technology and the characteristics of silicon materials, it is difficult for silicon pressure sensors to be used in harsh environments such as high pressure, high temperature and corrosiveness. Contents of the invention [0003] Aiming at the deficiencies of the prior art, the present invention aims to pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/06
CPCG01L9/06
Inventor 刘胜吴登峰王小平李凡亮曹万
Owner WUHAN FINEMEMS
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