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Chlorosilane liquid neutralization treatment device and treatment method

A processing device and liquid processing technology, applied in chemical instruments and methods, chemical/physical/physical-chemical processes, chemical/physical/physical-chemical stationary reactors, etc. problem, to achieve the effect of simple structure, reducing corrosion and preventing clogging

Active Publication Date: 2018-06-08
TOKUYAMA CHEM ZHEJIANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this method has the following problems: the chlorosilane liquid that reacts with water will produce silicon dioxide by-product, which will block the liquid outflow port of the chlorosilane liquid supply pipe 1, and the by-generated hydrochloric acid gas will corrode the pipeline and cannot be used for a long time
Especially if the chlorosilane liquid is the waste liquid discharged from the process of producing trichlorosilane through the above-mentioned reaction between metal silicon and hydrogen chloride, most of the waste liquid will contain solid metal chlorides derived from metal impurities in metal silicon , if the chlorosilane liquid contains solid matter like this, the solid matter will adhere to the side wall of the liquid outflow port, and the accumulation of silica and the condensation of by-product hydrochloric acid gas will easily occur, clogging and corrosion of the above-mentioned liquid outflow port the problem will get worse

Method used

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  • Chlorosilane liquid neutralization treatment device and treatment method
  • Chlorosilane liquid neutralization treatment device and treatment method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] use as figure 2 The shown chlorosilane liquid neutralization treatment device performs neutralization treatment of chlorosilane liquid. The chlorosilane liquid used in this embodiment is the distillation residue of trichlorosilane synthesized by the reaction of metal silicon and hydrogen chloride (the content of silicon tetrachloride is 70% by mass; the solid content formed by metal chloride is 70% by mass. 2%), what is stored in the storage tank 2 is that the mass fraction is 10% sodium hydroxide aqueous solution.

[0053] The chlorosilane liquid supplied by the supply pipe 1 flows into the storage tank 2 along the liquid surface of the alkaline neutralizing liquid 3 to react with the alkaline neutralizing liquid 3, and the injection pipe 4 flows toward the liquid outlet Inert gas is sprayed around the side walls. Wherein, from the chlorosilane supply line 1, the amount per square meter (0.33L / second) of the liquid outlet 13 of the chlorosilane liquid supply pipe 1 ...

Embodiment example 2

[0058] In the modification example 1, the condition of supplying the above-mentioned chlorosilane liquid from the chlorosilane supply line 1 with the amount per square meter (0.33 L / sec) of the liquid outlet surface of the chlorosilane liquid supply pipe 1 is supplied, and at the same time, the injection pipe 4 Nitrogen gas in the gas is sprayed at the amount per square meter (0.72NL / second) of the gas outlet surface, and the supply rate relative to the above-mentioned chlorosilane liquid is 2.2NL / L, and the others are the same as the above-mentioned embodiment 1. Neutralization of chlorosilane liquids.

[0059] While replenishing the alkaline neutralizing solution 3 in the storage tank 2, the pH of the alkaline neutralizing solution 3 was controlled at 8 to 12, and the neutralization treatment was continued for 1 hour, but the liquid outflow from the chlorine supply pipe 1 did not occur. 13 clogging problems. After that, the neutralization treatment was carried out continuou...

comparative example 1

[0061] For Embodiment 1, the chlorosilane liquid was supplied from the chlorosilane supply line 1 while nitrogen gas was not injected from the injection pipe 4 , and the same neutralization treatment of the chlorosilane liquid was performed as in Embodiment 1 above.

[0062] While replenishing the alkaline neutralizing solution 3 in the storage tank 2, the pH of the alkaline neutralizing solution 3 was controlled at 8 to 12, and the neutralization treatment was carried out continuously for 1 hour, but the liquid outlet 13 of the chlorosilane supply line 1 A blockage has occurred at the end and processing cannot continue.

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Abstract

The invention provides a chlorosilane liquid neutralization treatment device, which comprises alkaline neutralization liquid, a storage tank, a supply pipe and a spraying pipe, wherein the alkaline neutralization liquid is used for neutralizing chlorosilane liquid; the storage tank is used for storing the alkaline neutralization liquid; the supply pipe is used for supplying the chlorosilane liquid; the spraying pipe is used for spraying inert gas; the supply pipe is arranged in the storage tank; the spraying pipe is arranged around a liquid flow-out opening of the supply pipe for spraying theinert gas to the side wall of the liquid flow-out opening formed through enclosing so as to prevent the liquid flow-out opening blockage and the supply pipe corrosion by by-product hydrochloric acid.By the technological means, the conditions that chlorosilane liquid and water react to generate by-product silicon dioxide which can block the liquid flow-out opening part of the supply pipe and by-product hydrochloric acid which can corrode the liquid flow-out opening part can be greatly reduced. The chlorosilane liquid neutralization treatment device has the advantages that the structure is simple; the use is convenient; higher practicability is realized.

Description

technical field [0001] The invention relates to the technical field of purification and recovery, in particular to a chlorosilane liquid neutralization treatment device and treatment method. Background technique [0002] Chlorosilanes are widely used as raw materials for silicone resins, surface treatment agents, and polysilicon used in silicon wafers and solar cells. Dimethyldichlorosilane as the raw material of silicone resin is synthesized by the reaction of metal silicon and methyl chloride, and trichlorosilane as the raw material of polysilicon is synthesized by the reaction of metal silicon and hydrogen chloride. [0003] The above reactions are all refined through a distillation tower, and a chlorosilane production section capable of producing the required purity is required. Chlorosilanes other than the target products separated by distillation can be used as raw materials for silica and surface treatment agents as needed, but chlorosilane liquids that cannot be suf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/18
CPCB01J19/0053B01J19/18
Inventor 吴中明
Owner TOKUYAMA CHEM ZHEJIANG
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