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Self-adaptive polishing head

A self-adaptive, polishing head technology, applied in the field of polishing heads, can solve the problems of insufficient centering function and poor adaptability

Pending Publication Date: 2018-05-18
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The polishing head is an important part of the chemical mechanical polishing unit. The polishing head in the related art is equivalent to a universal joint. The pivot assembly can only absorb the vibration in the up and down direction between the clip assembly and the base. Driven by the rotary drive mechanism, the polishing head , the pivot assembly performs high-speed rotational movement relative to the base, causing the pivot assembly to deflect to a certain extent and produce circumferential swing, which has the problems of insufficient centering function and poor adaptability

Method used

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Embodiment Construction

[0037] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0038] In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must be in a particular o...

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Abstract

The invention discloses a self-adaptive polishing head which comprises a pivot assembly, a base body and a clamping piece assembly. The pivot assembly is composed of a shaft body and a disc body. Thebase body is provided with a shaft hole suitable for being matched with the shaft body. The clamping piece assembly is provided with a groove suitable for being matched with the disc body. The shaft body on the pivot assembly is matched with the shaft hole in the base body. The disc body on the pivot assembly is arranged in the groove in the clamping piece assembly. An annular flange is arranged on the peripheral wall of the disc body, and the peripheral surface of the annular flange is in line contact with the inner circumferential wall of the groove. According to the self-adaptive polishinghead, the centering function of the polishing head can be guaranteed, and the stability and self-adaptability of the polishing head are improved.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing, in particular to an adaptive polishing head. Background technique [0002] The polishing head is an important part of the chemical mechanical polishing unit. The polishing head in the related art is equivalent to a universal joint. The pivot assembly can only absorb the vibration in the up and down direction between the clip assembly and the base. Driven by the rotating drive mechanism, the polishing head , the pivot assembly performs high-speed rotational movement relative to the base, so that the pivot assembly will deflect to a certain extent and produce circumferential swing, which has the problems of insufficient centering function and poor adaptability. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. For this reason, the present invention proposes an adaptive polish...

Claims

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Application Information

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IPC IPC(8): B24B29/02B24B41/04
CPCB24B29/02B24B41/047
Inventor 赵德文路新春陈祥玉
Owner TSINGHUA UNIV
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