Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Monolithic Integrated Magnetic Inductive Sensor Based on Surface Acoustic Wave Resonator

A magnetic induction sensor and surface acoustic wave technology, applied in the direction of the size/direction of the magnetic field, can solve the problems of difficult production and processing, low integration of magnetic induction sensors, etc., and achieve the effects of easy production and processing, easy digital acquisition and processing, and easy realization

Active Publication Date: 2019-09-13
YANGZHOU UNIV
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In short, the problems existing in the prior art are: the integration degree of the magnetic induction sensor is not high, and it is not easy to produce and process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Monolithic Integrated Magnetic Inductive Sensor Based on Surface Acoustic Wave Resonator
  • Monolithic Integrated Magnetic Inductive Sensor Based on Surface Acoustic Wave Resonator
  • Monolithic Integrated Magnetic Inductive Sensor Based on Surface Acoustic Wave Resonator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0032] like figure 1 As shown, the monolithic integrated magnetic induction sensor based on the surface acoustic wave resonator of the present invention comprises a piezoelectric substrate 1, a surface acoustic wave resonator etched on the piezoelectric substrate 1, a plane etched on the piezoelectric substrate 1 The magnetic induction coil 8, the planar magnetic induction coil 8 surrounds the periphery of the surface acoustic wave resonator, and the inner end of the planar magnetic induction coil 8 is connected to the surface acoustic wave resonator through the DC bias electrode 44 and the DC bias bridge 94 successively, Its outer end is connected to the DC bias ground electrode 104 etched on the upper edge of the piezoelectric substrate 1 .

[0033] like figure 2 , 3 , 4, 5,

[0034] The surface acoustic wave resonator includes a metal structure layer, an intermediate dielectric layer and a voltage regulation electrode layer laminated on the piezoelectric substrate 1 in ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a monolithic integrated magnetic induction sensor based on a surface acoustic wave resonator, comprising a piezoelectric substrate (1), a surface acoustic wave resonator etched on the piezoelectric substrate (1), and a surface acoustic wave resonator etched on the piezoelectric substrate The planar magnetic induction coil (8) on (1), the described planar magnetic induction coil (8) surrounds the periphery of the surface acoustic wave resonator, and the inner end of the planar magnetic induction coil (8) passes through the DC bias electrode (44), DC bias successively A crossover bridge (94) is connected to the surface acoustic wave resonator, and its outer end is connected to the DC bias ground electrode (104) etched on the upper edge of the piezoelectric substrate (1). The single-chip integrated magnetic induction sensor based on the surface acoustic wave resonator of the present invention has high integration and is easy to produce and process.

Description

technical field [0001] The invention belongs to the technical field of magnetic induction sensors, in particular to a single-chip integrated magnetic induction sensor based on a surface acoustic wave resonator with high integration and easy production and processing. Background technique [0002] The magnetic induction sensor is a sensor used to measure the spatial magnetic field. It realizes the sensing of the spatial magnetic field by converting the magnetic quantity signal into an electrical signal. [0003] Magnetic induction sensors in the current technology include reed switches, mutual inductance transformers, Hall effect elements, fluxgate sensors, and the like. Their common disadvantages are discrete structure, large volume, small dynamic range and low measurement accuracy. [0004] In recent years, new magnetic induction sensors with various magnetoresistance materials such as anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR) and tunnel magnetores...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/02
Inventor 赵成陈磊杨义军胡经国
Owner YANGZHOU UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com