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An evaporation source device for oled evaporation

An evaporation source and evaporation material technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of decomposition or deterioration of organic materials, uneven distribution of organic materials, exposed bottom, etc., to reduce The effect of decomposing or deteriorating, reducing uneven heating, and avoiding partial exposure

Active Publication Date: 2020-01-17
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the poor thermal conductivity of the organic material itself, when the heater 2 heats the side wall of the crucible 1, it is easy to cause uneven heat transfer. The larger the size of the evaporation source, the more obvious the uneven temperature distribution, which in turn affects the evaporation of the organic material. Stability and Yield
[0005] Especially for the sublimation type organic material, because the organic material close to the crucible wall in the crucible 1 is heated first, it will be sublimated earlier, and the organic material in the central part of the crucible will gradually form such as figure 1 In the vertical island-shaped outline 31 shown in , in order to maintain a stable evaporation rate, the evaporation source will continue to increase the temperature, which will make the organic material in the crucible 1 in contact with the bottom of the crucible 1 be heated more, resulting in the decomposition of the organic material Or deterioration, resulting in material waste and pollution, further affecting the performance of OLED evaporation devices
[0006] In addition, in the prior art, the crucible used for the evaporation source of OLED evaporation is mostly a large flat bottom structure. In addition, the organic material itself is relatively viscous and the surface tension after liquefaction, when there are few organic materials in the crucible, it is easy to cause the organic material to be trapped in the crucible. The distribution of the organic material is not uniform, and the bottom will be partially exposed during the evaporation process, which will affect the uniformity of the evaporation of the organic material.

Method used

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  • An evaporation source device for oled evaporation
  • An evaporation source device for oled evaporation
  • An evaporation source device for oled evaporation

Examples

Experimental program
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Effect test

Embodiment 1

[0039] Such as figure 2 As shown, the present embodiment provides an evaporation source device for OLED evaporation, including an evaporation source body composed of a crucible 10 and a heater 20, the crucible 10 is heated by the heater 20, and an evaporation source body arranged on the evaporation source body The vibrator 40 on the evaporation source body can continuously or intermittently vibrate the vapor deposition material 30 in the crucible 10, so that the vapor deposition material 30 in the crucible 10 30 maintains the largest contact area with the side wall of the crucible 10 to improve the uniformity of heating of the evaporated material.

[0040] A heater 20 is also arranged around the nozzle 101 of the crucible 10 , and the heater 20 may be a resistance wire winding structure, so that the evaporation gas can be ejected smoothly when passing through the nozzle 101 without clogging the nozzle 101 . The crucible 10 is provided with a baffle 50 that can pass through t...

Embodiment 2

[0045] Such as image 3 As shown, this embodiment provides an evaporation source device for OLED evaporation, which has a structure similar to that of Embodiment 1, and the similarities will not be repeated. The difference between it and Embodiment 1 is that the lower part of the crucible 10 The structure is set as a trapezoidal cross-sectional shape with a large top and a small bottom, and a heater 20 is arranged around the trapezoidal inclined outer wall. By changing the structural shape of the crucible 10, the contact area between the vapor deposition material 30 and the side wall of the crucible is kept relatively large, which can avoid partial exposure of the bottom during the vapor deposition process. When the vapor deposition material 30 in the crucible is less, the evaporation can be reduced. Occurrence of local uneven heating of the material 30 can improve the uniformity of evaporation of the evaporation material 30 .

[0046] As a preferred solution of an evaporatio...

Embodiment 3

[0050] Such as Figure 5a , Figure 5b and Figure 6 As shown, this embodiment provides an evaporation source device for OLED evaporation, which has a structure similar to that of Embodiment 2, and the similarities will not be repeated. The difference between it and Embodiment 2 is that the crucible 10 With multi-point nozzles or linear nozzles, the crucible body is a combined structure of a hollow cuboid and a hollow quadrangular prism, which has all the advantages of Embodiment 1 and Embodiment 2.

[0051] Furthermore, in some optional implementations, the hollow quadrangular truss that makes up the crucible 10 can be inclined at 30° to 60° on all four sides (such as Figure 5a shown), or only two sides can be inclined at 30°~60° (such as Figure 5b shown), and Figure 5b The two inclined side surfaces in the center correspond to the direction in which the nozzles 101 are arranged.

[0052] Preferably, the vibrator 40 is arranged directly below the crucible 10, and more...

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Abstract

The invention relates to an evaporation source device used for OLED evaporation plating, and relates to the technical field of evaporation plating equipment. The evaporation source device used for OLED evaporation plating comprises an evaporation source body formed by a crucible and heaters, wherein the crucible is heated by the heaters; the evaporation source device used for OLED evaporation plating further comprises a vibrator arranged on the evaporation source body; and an evaporation plating material in the crucible is vibrated continuously or intermittently through the vibrator arranged on the evaporation source body, so that the contact area of the evaporation plating material in the crucible and the side wall of the crucible is kept the maximum, and the heating uniformity of the evaporation plating material is improved. The evaporation source device used for OLED evaporation plating has the benefits as follows: an upright island structure caused by non-uniform heating is eliminated through the arranged vibrator, the evaporation plating material in the crucible is kept relatively smooth in the surface, the contact area of the evaporation plating material and the side wall ofthe crucible is always kept the maximum, the excessive heating situation of the local part of the evaporation plating material is reduced, the phenomenon of decomposition or degradation of the evaporation plating material is further reduced, and the yield rate of the evaporation plating material is improved.

Description

technical field [0001] The invention relates to the technical field of evaporation equipment, in particular to an evaporation source device for OLED evaporation. Background technique [0002] In recent years, with people's pursuit of higher quality display products, OLED (Organic Light-Emitting Diode), as a new type of flat panel display technology, has gradually received more attention. High, fast response, low energy consumption, wide operating temperature range, and flexible display, OLED has become the most potential emerging technology to replace LCD liquid crystal display. [0003] At present, OLED display products are generally produced by evaporation of organic materials at home and abroad. The evaporation sources of today's OLED evaporation devices are mainly divided into point evaporation sources and linear evaporation sources. There are mainly two types of organic materials used for OLED evaporation in the evaporation source device: one is a molten organic materi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCC23C14/24C23C14/243
Inventor 郑子明赵军吕海超彭勃
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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