High-precision mask plate

Abstract

The invention discloses a high-precision mask plate which comprises a plate frame, multiple strip-shaped mask sheets and a supporting mask net. A hollow-out area is formed in the center of the plate frame. The periphery of the hollow-out area forms a frame edge. The top faces of two opposite edges on the plate edge are provided with strip-shaped grooves correspondingly. A spliced gap is formed between every two adjacent strip-shaped mask sheets. The two ends of each strip-shaped mask sheet are welded to the top faces of the other two opposite edges on the plate edge. Each strip-shaped mask sheet is provided with a mask pattern. The supporting mask net is located below the multiple strip-shaped mask sheets. The two opposite side edges on the supporting mask net extend to form welding edgescorrespondingly. The two welding edges are welded into two strip-shaped grooves correspondingly. The supporting mask net supports the multiple strip-shaped mask sheets and covers all the spliced gapswithout shielding all the mask patterns. According to the high-precision mask plate, the film coating requirement of a glass substrate with the large size can be met, batch production is achieved, theproduction efficiency is improved, and the requirements of a displayer for the yield and precision in the batch production process can also be met.

Description

technical field [0001] The invention relates to a mask, in particular to a high-precision mask. Background technique [0002] An organic light emitting diode (Organic Light Emitting Diode, OLED) display is a self-luminous display device. Due to its advantages of low power consumption, high display brightness, wide viewing angle and fast response speed, OLED displays are becoming more and more popular in the market. [0003] In the manufacturing technology of OLED displays, the mask plate technology in vacuum evaporation (such as fine metal mask sheet (Fine Metal Mask Sheet, FMM Sheet)) is a very important and key technology, which directly affects the quality and quality of OLED products. manufacturing cost. Generally, there is at least one mask pattern on the mask plate, and for mass production and processing, the mask patterns on the mask plate are multiple and distributed in a matrix. When the mask plate is used for coating processing, use these masks The pattern can f...

AI Technical Summary

Problems solved by technology

[0004] The larger the size of the mask plate, the larger the size of the glass substrate can be coated, and the larger the number of display devices processed in each mass production, but the larger the size of the mask plate, the more difficult it is to control the precision, resulting in the display of production processing. The accuracy and resolution of the device cannot meet the expected requirements, and the defective rate is high

At the same time, because the size of the mask had to be reduced under the premise of ensuring the accuracy, the corresponding production efficiency decreased

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