A freely adjustable micro-nano machining platform

Abstract

The invention discloses a free adjustable micro-nano machine machining platform, and belongs to the technical scheme of mechanical structure design. The free adjustable micro-nano machine machining platform is suitable for adjusting the machining position of a micro-nano platform. Three stand columns are vertically and evenly arranged on a base in the circumferential direction, a bottom layer platform is connected with a sliding block base through a supporting connecting rod, an output rotating shaft of a drive motor is connected with a wedge gear, a top layer platform is parallel to the bottom layer platform, an annular rack is arranged at the bottom of the top layer platform, and the annular rack is engaged with the wedge gear. According to the platform, multi-freedom-degree adjusting isachieved, it is ensured that the a sample machined by the micro-nano machine on the top layer platform can be freely adjusted in a multi-angle manner, the driving adjusting manner is adopted, a sliding block base can be circumferentially and vertically adjusted around the stand columns within a certain range, it is ensured that the position between the supporting connecting rod and the bottom layer platform is adjusted, the driving motor drives the wedge gear, the gradual change of the wedge gear ensured that the position of the top layer platform can be effectively adjusted, and the platformis high in automation degree, and stable and efficient in adjusting process.

Description

technical field [0001] The invention relates to a freely adjustable micro-nano machining platform, which is suitable for adjusting the processing position of the micro-nano platform and belongs to the technical field of mechanical structure design. Background technique [0002] The micro-nano processing platform is a technology that provides micro-nano processing technology, including photolithography, nano-imprinting, electron beam evaporation, wet etching, dry etching, surface topography measurement, fine engraving and simple small-scale machining, etc. . [0003] Most of the existing micro-nano processing platforms have a fixed structure. When the processing object needs to be adjusted, it is often used to add pads or leveling structures on the surface of the processing platform for secondary adjustments. This makes the operation process complicated and difficult to guarantee processing. Quality; In addition, when working on a micro-nano processing platform, the processi...

AI Technical Summary

Problems solved by technology

[0003] Most of the existing micro-nano processing platforms have a fixed structure. When the processing object needs to be adjusted, it is often used to add pads or leveling structures on the surface of the processing platform for secondary adjustments. This makes the operation process complicated and difficult to guarantee processing. Quality; In addition, when working on a micro-nano processing platform, the processing object is generally soft, and additional processing position adjustments will easily lead to unnecessary damage to the processing object, and the processing quality cannot be guaranteed

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