Rotary output double-mass-block tuning fork angular rate gyroscope

Abstract

The invention discloses a rotary output double-mass block tuning fork angular rate gyroscope which comprises an upper layer vacuum encapsulation cover plate, a lower layer silicon substrate and a middle layer monocrystalline silicon wafer, wherein a gyro mechanical structure is arranged on the middle layer monocrystalline silicon wafer; two substructures of the gyro mechanical structure are bilaterally and symmetrically distributed on the two sides of middle support straight beams of cross beams and a drive capacitor and connected with the cross beams; the cross beam is anchored to the upper layer vacuum encapsulation cover plate and the lower layer silicon substrate via the middle support straight beams and end part folding beams; a part of a mechanical structure of a middle layer is overhung between the upper layer encapsulation cover plate and the lower layer silicon substrate. The gyroscope achieves rotary mode output, and reduces kinematic coupling between a drive mode and a detection mode and change of the drive capacitor during operation; the performance stability of the gyroscope is improved; high order mode frequency is above twice of working mode frequency; effective modeisolation is achieved; the gyroscope has higher vibrating disturbance resistance.

Description

technical field [0001] The invention belongs to the micro-electromechanical system and micro-inertia measurement technology, in particular to a dual-mass tuning fork angular rate gyroscope with rotational output. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, such as airbags...

AI Technical Summary

Problems solved by technology

However, in the bulk silicon process, it is quite difficult to process the vertical torsion bar

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