Modular manufacturing multi-purpose winding-type vacuum coating machine

Abstract

The invention provides a modular manufacturing multi-purpose winding-type vacuum coating machine. The modular manufacturing multi-purpose winding-type vacuum coating machine comprises at least two vacuum winding coating system units. The two adjacent vacuum winding coating system units are connected through a vacuum coupling valve. A roll material to be coated passes through the vacuum coupling valve and goes into the next empty winding coating system unit. Each vacuum winding coating system unit comprises an unwinding chamber, a coating chamber, a heat treatment chamber and a winding chamber which are each provided with a plurality of reels used for tensioning and conveying the roll material to be coated and changing the winding direction of the roll material to be coated. Each coating chamber is provided with a coating hub. After one surface of the roll material to be coated is subjected to coating in the previous vacuum winding coating system unit, the winding direction of the roll material to be coated is changed through the reels, and the other surface of the roll material to be coated is subjected to coating in the next vacuum winding coating system unit.

Description

technical field [0001] The invention relates to the industries of vacuum coating, capacitor film manufacturing and photoelectric display film manufacturing, and realizes single / double-sided coating for flexible film materials, in particular to a modular manufacturing multi-purpose winding vacuum coating machine. Background technique [0002] Vacuum coating is a kind of plasma technology application, that is, in a vacuum environment, the magnetron sputtering cathode with the material to be plated is ignited (the resistance evaporation method is to heat the film material crucible), the magnetron cathode generates plasma, and high-energy ions The particles to be coated are sputtered out by bombarding the target surface (film material), and the sputtered particles are deposited on the workpiece to be plated to form a simple film, a compound film, etc. [0003] Roll-to-roll vacuum coating technology is widely used in the field of functional and decorative film manufacturing of fl...

AI Technical Summary

Problems solved by technology

[0004] The winding mechanisms used in conventional winding vacuum coating equipment are mostly single chamber or multi-chamber. For single chamber equipment, its structural characteristics are: a. It includes a sealed vacuum container (circular or rectangular chamber) ; b. A metal partition is used to isolate an unwinding area, a coating area, and a winding area in the container; c. It has the advantages of compact design, small footprint, and low cost; d. The disadvantage is that each area Poor atmosphere isolation, more dust pollution during work, limited production film system, low production capacity, etc.

For multi-cavity equipment, its disadvantages are the production of single-coated main hub, limited production film system, single product variety, equipment can only be customized according to the process, and the manufacturing cost is high.

[0005] The above-mentioned equipment structure design is the commonly used winding-type vacuum coating equipment at present. The design and manufacture of the equipment are all special equipment that must be independently designed on the basis of prior determination of the product process. They can only coat single-sided film-forming products. When producing double-sided coating products, it is necessary to turn over the coating (foil material) for secondary processing, which has the disadvantages of low yield and low production efficiency; when producing simple film products, low equipment utilization rate and other defects

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