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Preparation method of black TiO2 coating

A black titanium dioxide and coating technology, which is applied in the field of photocatalytic materials, can solve the problems of low possibility and influence of continuous processing, and achieve the characteristics of changing energy band and light response range, improving absorption, and improving visible/infrared photocatalytic activity. Effect

Inactive Publication Date: 2017-12-22
DONGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The above-mentioned methods of doping, hydrogen reduction, plasma-assisted hydrogen reduction and other methods to prepare black titanium dioxide materials are generally complicated and require long-term processing at high temperature and high pressure, or long-term processing at vacuum and low pressure. The possibility of continuous processing is not high, which affects the actual application

Method used

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  • Preparation method of black TiO2 coating
  • Preparation method of black TiO2 coating
  • Preparation method of black TiO2 coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] At a quartz substrate temperature of 200°C (the discharge gap of the barrier discharge plasma reactor is 2 mm), the titanium dioxide coating is first vapor-deposited by atmospheric pressure plasma, Ar:O2 :Ar(TiCl 4 ) flow rates were 950:10:20 (sccm), the deposition time was 20 min, the plasma frequency was 60 kHz, and the voltage was 10000 v.

[0035] After the deposition is over, turn off the kHz power supply and the deposition reaction gas, cool to room temperature, replace with a 13.56MHz RF plasma power supply, and mix He / H 2 The mixed gas is passed into the reaction chamber at a ratio of 50:1, treated at 50W for 10 minutes, and the black titanium dioxide coating is taken out.

[0036] Optical image of TiO2 coating figure 2 shown. The absorbance of the titanium dioxide coating before and after treatment was characterized by a UV-vis spectrophotometer. It can be seen that the as-deposited untreated TiO coating is white, reflecting the TiO 2 Typical visible ultra...

Embodiment 2

[0038] At a quartz substrate temperature of 180°C (the discharge gap of the barrier discharge plasma reactor is 2mm), the titanium dioxide coating is first vapor-deposited by atmospheric pressure plasma, Ar:O 2 :Ar(TiCl 4 ) flow rates were 500:10:10 (sccm), the deposition time was 30 min, the plasma frequency was 30 kHz, and the voltage was 20000 v.

[0039] After the deposition is over, turn off the kHz power supply and the deposition reaction gas, cool to room temperature, replace with a 1MHz radio frequency plasma power supply, and mix He / H 2 The mixed gas is passed into the reaction chamber at a ratio of 15:1, treated at 160W for 30 minutes, and the black titanium dioxide coating is taken out.

[0040] The optical photos and visible ultraviolet absorption spectra before and after treatment are as follows: Figure 4 , it can be seen that the deposited titanium dioxide coating has only extremely low absorption in the visible and infrared parts, while the treated black tita...

Embodiment 3

[0042] Metallic nickel foam is deposited at a temperature of 100°C (the discharge gap of the barrier discharge plasma reactor is 2 mm), and the titanium dioxide coating is first vapor-deposited by atmospheric pressure plasma, Ar:O 2 :Ar(TiCl 4 ) flows were 300:2:10 (sccm), the deposition time was 40min, the plasma frequency was 100kHz, and the voltage was 10000v.

[0043] After the deposition is over, turn off the kHz power supply and the deposition reaction gas, cool to room temperature, replace with a 27MHz RF plasma power supply, and mix He / H 2 The mixed gas is passed into the reaction chamber according to the ratio of 30:1, 100W is used for 30 minutes, and the black titanium dioxide coating is taken out.

[0044] Figure 5 As shown, the optical photographs of the metal foam titanium dioxide coating before and after treatment show that the coating before treatment is white, and the coating after treatment is obviously blackened.

[0045] From Figure 5 It can also be fo...

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Abstract

The invention relates to a preparation method of a black TiO2 coating, which includes the steps of: 1) under normal pressure and at from room temperature to 200 DEG C, feeding a mixed gas of TiCl4, O2 and a discharging gas into a reaction chamber, and switching on a normal-pressure kHz radio frequency plasma power supply to deposit a TiO2 coating; 2) changing the power supply by a normal-pressure MHz radio frequency plasma power supply, feeding a mixed gas of He and H2, switching on the radio frequency power supply to generate hydrogen plasma, and treating the TiO2 coating at normal temperature to form the black TiO2 coating. The method greatly changes the energy band and photo-response range of the TiO2 material. The black TiO2 coating is improved in absorption in visible light and infrared light zones and is greatly improved in photocatalytic activity under visible light and infrared light. Meanwhile, the black TiO2 coating can be deposited on and coat the surface of materials, such as polymers, so that the black TiO2 coating has important value in practical applications such as dye-sensitized solar cells, hydrogen production with visible light, and environment management, etc.

Description

technical field [0001] The invention belongs to the field of photocatalytic materials, in particular to a method for preparing a black titanium dioxide coating. Background technique [0002] Titanium dioxide has the characteristics of high photocatalytic activity and stable chemical properties. It has a wide range of applications in clean energy and environmental governance. It has always been a hot spot in the research and application of photocatalytic materials. However, as a wide-bandgap indirect semiconductor material, its absorption threshold is below 387nm, and its absorption utilization rate of sunlight is extremely low in the solar spectrum dominated by visible light (44%) and infrared rays (53%). Therefore, it is very necessary to broaden its energy band structure, improve its absorption in the visible light and near-infrared regions, and its photocatalytic response characteristics. It is also very important for the large-scale use of titanium dioxide photocatalytic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J21/06B01J35/02B01J37/34C23C16/40C23C16/453C23C16/56B01J35/00
CPCC23C16/405C23C16/453C23C16/56B01J21/063B01J37/349B01J35/00B01J35/30B01J35/39
Inventor 张菁徐雨李灵均
Owner DONGHUA UNIV
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