Transistor acoustic sensing element, preparation method thereof, acoustic sensor and portable device
An acoustic sensor and acoustic sensing technology, applied in the sensor field, can solve problems such as difficulty in meeting sensitivity, flexibility and small size requirements, and achieve the effects of expanding the sound sensing range, improving sensing performance, and improving sensitivity
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Embodiment 1
[0040] This embodiment provides a transistor acoustic sensing element, such as figure 1 and figure 2 As shown, it includes a gate 2, a gate insulating layer 3, a first pole 4, an active layer 5 and a second pole 6 arranged on a substrate 1. The active layer 5 is a three-dimensional mesh structure of nanometer thin wires, and the active layer 5. Vibration can be generated under the action of the sound signal, so that the output current of the transistor sound sensing element changes accordingly.
[0041] Wherein, the active layer 5 is disposed between the first pole 4 and the second pole 6, and the transistor acoustic sensing element is a transistor with a vertical structure. The first pole 4 and the second pole 6 are respectively the source and the drain of the transistor. The transistor with this vertical structure is a charge injection controlled device, that is, when a negative bias is applied on the source and gate 2, holes can accumulate at the interface between the so...
Embodiment 2
[0057] This embodiment provides an acoustic sensor, including a plurality of transistor acoustic sensing elements in Embodiment 1, and the plurality of transistor acoustic sensing elements are arranged in an array.
[0058] The acoustic sensor formed by a plurality of transistor acoustic sensing elements arranged in an array has a wider sensing range for sound and a higher sensing sensitivity for sound.
[0059] Preferably, the acoustic sensor also includes a signal acquisition and analysis unit, the signal acquisition and analysis unit is connected to each transistor acoustic sensing element, and is used to collect the output signals of each transistor acoustic sensing element and conduct comprehensive analysis to obtain the source of the sound signal. direction distribution information and intensity distribution information. Wherein, the direction distribution information of the sound signal refers to the direction from which the sound signal is denser and the direction from...
Embodiment 3
[0062] This embodiment provides a portable device, including the acoustic sensor in Embodiment 2.
[0063] By adopting the acoustic sensor in the second embodiment, the sound sensing sensitivity of the portable device is improved, and the sound sensing range thereof is expanded.
[0064] The portable device provided by the present invention is any intelligent electronic device that can be carried around.
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